• Journal of Semiconductors
  • Vol. 41, Issue 8, 082002 (2020)
Chang Li1、2, Cheng Chen2、3, Jie Chen2、3, Tao He4, Hongwei Li2、5, Zeyuan Yang1、2, Liu Xie2, Zhongchang Wang6, and Kai Zhang2
Author Affiliations
  • 1Nano Science and Technology Institute, University of Science and Technology of China, Suzhou 215123, China
  • 2i-Lab, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences, Suzhou 215123, China
  • 3School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
  • 4CAS Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences, Suzhou 215123, China
  • 5Institute of Microscale Optoelectronics, Collaborative Innovation Centre for Optoelectronic Science & Technology, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen Key Laboratory of Micro-Nano Photonic Information Technology, Guangdong Laboratory of Artificial Intelligence and Digital Economy (SZ), Shenzhen University, Shenzhen 518060, China
  • 6International Iberian Nanotechnology Laboratory (INL), Avenida Mestre José Veiga s/n, Braga 4715-330, Portugal
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    DOI: 10.1088/1674-4926/41/8/082002 Cite this Article
    Chang Li, Cheng Chen, Jie Chen, Tao He, Hongwei Li, Zeyuan Yang, Liu Xie, Zhongchang Wang, Kai Zhang. High-performance junction field-effect transistor based on black phosphorus/β-Ga2O3 heterostructure[J]. Journal of Semiconductors, 2020, 41(8): 082002 Copy Citation Text show less

    Abstract

    Black phosphorous (BP), an excellent two-dimensional (2D) monoelemental layered p-type semiconductor material with high carrier mobility and thickness-dependent tunable direct bandgap structure, has been widely applied in various devices. As the essential building blocks for modern electronic and optoelectronic devices, high quality PN junctions based on semiconductors have attracted widespread attention. Herein, we report a junction field-effect transistor (JFET) by integrating narrow-gap p-type BP and ultra-wide gap n-type β-Ga2O3 nanoflakes for the first time. BP and β-Ga2O3 form a vertical van der Waals (vdW) heterostructure by mechanically exfoliated method. The BP/β-Ga2O3 vdW heterostructure exhibits remarkable PN diode rectifying characteristics with a high rectifying ratio about 107 and a low reverse current around pA. More interestingly, by using the BP as the gate and β-Ga2O3 as the channel, the BP/β-Ga2O3 JFET devices demonstrate excellent n-channel JFET characteristics with the on/off ratio as high as 107, gate leakage current around as low as pA, maximum transconductance (gm) up to 25.3 µS and saturation drain current (IDSS) of 16.5 µA/µm. Moreover, it has a pinch-off voltage of –20 V and a minimum subthreshold swing of 260 mV/dec. These excellent n-channel JFET characteristics will expand the application of BP in future nanoelectronic devices.
    $ {g_{\rm{m}}} = \frac{{{\rm{d}}{I_{\rm{D}}}}}{{{\rm{d}}{V_{\rm{GS}}}}} = \frac{{q{N_{\rm d}}\mu tW}}{L}, $ ()

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    $\mu = \frac{{L{g_{\rm m}}}}{{q{N_{\rm d}}tW}}.$()

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    Chang Li, Cheng Chen, Jie Chen, Tao He, Hongwei Li, Zeyuan Yang, Liu Xie, Zhongchang Wang, Kai Zhang. High-performance junction field-effect transistor based on black phosphorus/β-Ga2O3 heterostructure[J]. Journal of Semiconductors, 2020, 41(8): 082002
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