Nan Lin, Wenhe Yang, Yunyi Chen, Xin Wei, Cheng Wang, Jiaoling Zhao, Yujie Peng, Yuxin Leng. Research Progress and Development Trend of Extreme Ultraviolet Lithography Source[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922002
- Laser & Optoelectronics Progress
- Vol. 59, Issue 9, 0922002 (2022)
![Schematic diagram of double pulse scheme of commercial laser plasma EUV source[22]](/richHtml/lop/2022/59/9/0922002/img_01.jpg)
Fig. 1. Schematic diagram of double pulse scheme of commercial laser plasma EUV source[22]
![Architecture representation of the LPP source system[25]](/richHtml/lop/2022/59/9/0922002/img_02.jpg)
Fig. 2. Architecture representation of the LPP source system[25]
![Regions of EUV radiation and laser energy deposition induced by different lasers. (a) Nd∶YAG laser; (b) CO2 laser[30]](/Images/icon/loading.gif){kind=icon}
Fig. 3. Regions of EUV radiation and laser energy deposition induced by different lasers. (a) Nd∶YAG laser; (b) CO2 laser[30]
Fig. 4. Schematic diagram of the MOPA technology[35]
Fig. 5. Schematic diagram of the droplet generator on demand[76]
Fig. 6. Schematic diagram of the droplet generator from ASML company [79]
Fig. 7. Layout of the typical shadow imaging system[78]
Fig. 8. Real and imaginary parts of the refractive index of some elements at 13.5 nm[85]
Fig. 9. CE of different target profile created by pre-pulse[35]
Fig. 10. Schematic diagram of the effect of double pulse effect[25]
Fig. 11. Variation curve of CE with CO2 laser pulse energy for different pre-pulses[13]
Fig. 12. Target expansion created by different pulse length of pre-pulse.(a) Effect created by ns pre-pulse; (b) effect created by ps pre-pulse; (c) EUV emission[34]
Fig. 13. Spatial distribution of the CO2 laser beam in the BTS. (a) Initial state; (b) not using BEX; (c) using BEX[34]
Fig. 14. Comparison of CO2 beam size evolution for different conditions[34]
Fig. 15. Influence of the pedestal on the profile of the tin target. (a) Profile of the tin target before and after suppression; (b) laser temporal profile after pedestal suppression[35]
Fig. 16. Droplet generated by 6 kHz signal based on Rayleigh jet breakup[72]
Fig. 17. Sensing and control scheme of the droplet position[13]
Fig. 18. Horizontal instability of the droplet[20]
Fig. 19. Vertical instability of the droplet[20]
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