Ultra-Precision and High-Speed Laser Interferometric Displacement Measurement Technology and Instrument

Hongxing Yang; Haijin Fu; Pengcheng Hu; Ruitao Yang; Xu Xing; Liang Yu; Di Chang; Jiubin Tan

doi:10.3788/LOP202259.0922018

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 9 >Page 0922018 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 9, 0922018 (2022)

Ultra-Precision and High-Speed Laser Interferometric Displacement Measurement Technology and Instrument

Hongxing Yang^1、2, Haijin Fu^1、2, Pengcheng Hu^1、2、*, Ruitao Yang^1、2, Xu Xing^1、2, Liang Yu^1、2, Di Chang^1、2, and Jiubin Tan^1、2

Author Affiliations

¹Institute of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, Heilongjiang , China

²Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry and Information Technology, Harbin Institute of Technology, Harbin 150080, Heilongjiang , China

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DOI: 10.3788/LOP202259.0922018 Cite this Article Set citation alerts

Hongxing Yang, Haijin Fu, Pengcheng Hu, Ruitao Yang, Xu Xing, Liang Yu, Di Chang, Jiubin Tan. Ultra-Precision and High-Speed Laser Interferometric Displacement Measurement Technology and Instrument[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922018 Copy Citation Text

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