Researching | Principle Technology of Laser SuperDiffraction Lithography

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 9 >Page 0922029 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 9, 0922029 (2022)

Principle and Technology of Laser Super-Diffraction Lithography

Zixin Liang, Yuanyuan Zhao, and Xuanming Duan^*

Author Affiliations

Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, Jinan University, Guangzhou 511443, Guangdong , China

show less

DOI: 10.3788/LOP202259.0922029 Cite this Article Set citation alerts

Zixin Liang, Yuanyuan Zhao, Xuanming Duan. Principle and Technology of Laser Super-Diffraction Lithography[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922029 Copy Citation Text

show less

Cited By

Article index updated: May. 20, 2024

Citation counts are provided from Researching.

The article is cited by 2 article(s) from Researching.

Get PDF(in Chinese)

Figures&Tables (18)

References (154)

Copy Citation Text

Zixin Liang, Yuanyuan Zhao, Xuanming Duan. Principle and Technology of Laser Super-Diffraction Lithography[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922029

Download Citation

Set citation alerts for the article

Set citation alerts for the article

Save the article for my favorites

Paper Information

Recommended Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology

Set citation alerts for the article

Please enter your email address