• Journal of Semiconductors
  • Vol. 42, Issue 6, 062803 (2021)
Jongwoon Yoon1 and Kwangsoo Kim2
Author Affiliations
  • 1Department of Electronic Engineering, Sogang University, Seoul 04107, Korea
  • 2Department of Electronic Engineering, Sogang University, Seoul 04107, Korea
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    DOI: 10.1088/1674-4926/42/6/062803 Cite this Article
    Jongwoon Yoon, Kwangsoo Kim. A 3.3 kV 4H-SiC split gate MOSFET with a central implant region for superior trade-off between static and switching performance[J]. Journal of Semiconductors, 2021, 42(6): 062803 Copy Citation Text show less

    Abstract

    A split gate MOSFET (SG-MOSFET) is widely known for reducing the reverse transfer capacitance (CRSS). In a 3.3 kV class, the SG-MOSFET does not provide reliable operation due to the high gate oxide electric field. In addition to the poor static performance, the SG-MOSFET has issues such as the punch through and drain-induced barrier lowering (DIBL) caused by the high gate oxide electric field. As such, a 3.3 kV 4H-SiC split gate MOSFET with a grounded central implant region (SG-CIMOSFET) is proposed to resolve these issues and for achieving a superior trade-off between the static and switching performance. The SG-CIMOSFET has a significantly low on-resistance (RON) and maximum gate oxide field (EOX) due to the central implant region. A grounded central implant region significantly reduces the CRSS and gate drain charge (QGD) by partially screening the gate-to-drain capacitive coupling. Compared to a planar MOSFET, the SG MOSFET, central implant MOSFET (CIMOSFET), the SG-CIMOSFET improve the RON×QGD by 83.7%, 72.4% and 44.5%, respectively. The results show that the device features not only the smallest switching energy loss but also the fastest switching time.
    $ {C_{{\rm{RSS}}}} = {\rm{}}\frac{{{C_{{\rm{ox}}}}{\rm{}} {\rm{}}{C_{{\rm{dep}}}}}}{{{C_{{\rm{ox}}}} + {C_{{\rm{dep}}}}}}, $ (1)

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    Jongwoon Yoon, Kwangsoo Kim. A 3.3 kV 4H-SiC split gate MOSFET with a central implant region for superior trade-off between static and switching performance[J]. Journal of Semiconductors, 2021, 42(6): 062803
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