• Journal of Semiconductors
  • Vol. 40, Issue 12, 121802 (2019)
Linlin Su, Dong Zhou, Hai Lu, Rong Zhang, and Youdou Zheng
Author Affiliations
  • School of Electronic Science and Engineering, Nanjing University, Nanjing 210093 China
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    DOI: 10.1088/1674-4926/40/12/121802 Cite this Article
    Linlin Su, Dong Zhou, Hai Lu, Rong Zhang, Youdou Zheng. Recent progress of SiC UV single photon counting avalanche photodiodes[J]. Journal of Semiconductors, 2019, 40(12): 121802 Copy Citation Text show less

    Abstract

    4H-SiC single photon counting avalanche photodiodes (SPADs) are prior devices for weak ultraviolet (UV) signal detection with the advantages of small size, low leakage current, high avalanche multiplication gain, and high quantum efficiency, which benefit from the large bandgap energy, high carrier drift velocity and excellent physical stability of 4H-SiC semiconductor material. UV detectors are widely used in many key applications, such as missile plume detection, corona discharge, UV astronomy, and biological and chemical agent detection. In this paper, we will describe basic concepts and review recent results on device design, process development, and basic characterizations of 4H-SiC avalanche photodiodes. Several promising device structures and uniformity of avalanche multiplication are discussed, which are important for achieving high performance of 4H-SiC UV SPADs.
    $ {\rm{SPDE}} = \frac{{{\rm{PCR}} - {\rm{DCR}}}}{{{F_{{\rm{il}}}}}} = {F_{\rm{f}}} \times {\rm{PAP}} \times {\rm{QE}},$ (21)

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    Linlin Su, Dong Zhou, Hai Lu, Rong Zhang, Youdou Zheng. Recent progress of SiC UV single photon counting avalanche photodiodes[J]. Journal of Semiconductors, 2019, 40(12): 121802
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