Researching

Journals
  • Advanced Photonics
  • Photonics Insights
  • Advanced Photonics Nexus
  • Photonics Research
  • Advanced Imaging
  • View All Journals
  • Chinese Optics Letters
  • High Power Laser Science and Engineering
    • Articles
  • Optics
  • Physics
  • Geography
  • View All Subjects
    • Conferences
  • CIOP
  • HPLSE
  • AP
  • View All Events
    • News
    About CLP
    Search by keywords or author
    Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 9 >Page 0922009 > Article
    • Laser & Optoelectronics Progress
    • Vol. 59, Issue 9, 0922009 (2022)
    Advanced Computational Lithography
    Miao Yuan, Yiyu Sun, and Yanqiu Li*
    Author Affiliations
  • School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
    • show less
    DOI: 10.3788/LOP202259.0922009 Cite this Article Set citation alerts
    Miao Yuan, Yiyu Sun, Yanqiu Li. Advanced Computational Lithography[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922009 Copy Citation Text show less
    Cited By
    Article index updated: May. 20, 2024
    Citation counts are provided from Researching.
    The article is cited by 1 article(s) from Researching.
    Abstract
    Get PDF(in Chinese)
    Figures&Tables (15)
    Equations (3)
    References (133)
    Cited By (1)
    Get Citation
    Copy Citation Text
    Miao Yuan, Yiyu Sun, Yanqiu Li. Advanced Computational Lithography[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922009
    Download Citation
    Set citation alerts for the article
    Tools
    Share
    Set citation alerts for the article
    Save the article for my favorites
    Paper Information
    Recommended Topics
    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology