• Journal of Semiconductors
  • Vol. 40, Issue 10, 101305 (2019)
Wenyu Yang1、2、3, Yajie Li1、2、3, Fangyuan Meng1、2、3, Hongyan Yu1、2、3, Mengqi Wang1、2、3, Pengfei Wang1、2、3, Guangzhen Luo1、2、3, Xuliang Zhou1、2、3, and Jiaoqing Pan1、2、3
Author Affiliations
  • 1Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China
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    DOI: 10.1088/1674-4926/40/10/101305 Cite this Article
    Wenyu Yang, Yajie Li, Fangyuan Meng, Hongyan Yu, Mengqi Wang, Pengfei Wang, Guangzhen Luo, Xuliang Zhou, Jiaoqing Pan. III–V compound materials and lasers on silicon[J]. Journal of Semiconductors, 2019, 40(10): 101305 Copy Citation Text show less
    Plane view SEM image of GaAs on Ge etched by melt KOH.
    Fig. 1. Plane view SEM image of GaAs on Ge etched by melt KOH.
    (Color online) (a) TEM images of GaAs on Si with a Ge buffer. (b) and (c) show the Ge/Si interface and the GaAs/Ge interface, respectively[26].
    Fig. 2. (Color online) (a) TEM images of GaAs on Si with a Ge buffer. (b) and (c) show the Ge/Si interface and the GaAs/Ge interface, respectively[26].
    (Color online) (a) CW PIV characteristics for an InAs QD laser on Si at 18 °C. (b) Emission spectrum for this device at various inject current density[31].
    Fig. 3. (Color online) (a) CW PIV characteristics for an InAs QD laser on Si at 18 °C. (b) Emission spectrum for this device at various inject current density[31].
    (Color online) (a) The cross-sectional schematic diagram of the hybrid laser. The arrows marked with “+” and “−” show hole and electron flows, respectively. (b) Single-sided L–I–V characteristics of the hybrid BRS laser under continuous wave (CW) condition at room temperature. (c) The optical spectrum at 30 mA injection current with a 40 dB SMSR.
    Fig. 4. (Color online) (a) The cross-sectional schematic diagram of the hybrid laser. The arrows marked with “+” and “−” show hole and electron flows, respectively. (b) Single-sided LIV characteristics of the hybrid BRS laser under continuous wave (CW) condition at room temperature. (c) The optical spectrum at 30 mA injection current with a 40 dB SMSR.
    (Color online) (a) ART technology silicon-based GaAs heteroepitaxial TEM image. (b) Lateral coverage epitaxial results. (c) Room temperature photoluminescence of GaAs grown on Si–GaAs substrate.
    Fig. 5. (Color online) (a) ART technology silicon-based GaAs heteroepitaxial TEM image. (b) Lateral coverage epitaxial results. (c) Room temperature photoluminescence of GaAs grown on Si–GaAs substrate.
    (Color online) (a) Schematic diagram of growing GaAs. (b) SEM image of GaAs. (c) TEM image of GaAs.
    Fig. 6. (Color online) (a) Schematic diagram of growing GaAs. (b) SEM image of GaAs. (c) TEM image of GaAs.
    (Color online) (a) ART technology silicon-based InP growth SEM image in 2010. (b) Schematic diagram of the atomic step creation mechanism. (c) ART technology silicon-based V-groove InP growth SEM image in 2012. (d) High-resolution TEM image at Si and InP (111) interface.
    Fig. 7. (Color online) (a) ART technology silicon-based InP growth SEM image in 2010. (b) Schematic diagram of the atomic step creation mechanism. (c) ART technology silicon-based V-groove InP growth SEM image in 2012. (d) High-resolution TEM image at Si and InP (111) interface.
    Silicon-based InGaAs/InP multiple quantum well structure and its photoluminescence spectrum at room temperature.
    Fig. 8. Silicon-based InGaAs/InP multiple quantum well structure and its photoluminescence spectrum at room temperature.
    (Color online) (a) Schematic diagram of a silicon-based InP DFB optical pump laser. (b) Cross-section electron micrograph of a silicon-based InP/InGaAs optical pump laser. (c) Cross-section electron micrograph of a silicon-based GaAs/InGaAs nanowire.
    Fig. 9. (Color online) (a) Schematic diagram of a silicon-based InP DFB optical pump laser. (b) Cross-section electron micrograph of a silicon-based InP/InGaAs optical pump laser. (c) Cross-section electron micrograph of a silicon-based GaAs/InGaAs nanowire.
    (Color online) (a) Cross-sectional TEM image of one representative InP/InGaAs nanoridge on (001) Si. (b) Schematic of the transferred InP/InGaAs nanoridge on a SiO2/Si substrate. (c) Microscopic image and SEM of the transferred InP/InGaAs nanoridge. (d) PL spectra of the transferred InP/ InGaAs nanoridge under different excitation levels. (e) Emission spectra of the InP/InGaAs nanoridge at increasing excitation levels at 4.5 K.
    Fig. 10. (Color online) (a) Cross-sectional TEM image of one representative InP/InGaAs nanoridge on (001) Si. (b) Schematic of the transferred InP/InGaAs nanoridge on a SiO2/Si substrate. (c) Microscopic image and SEM of the transferred InP/InGaAs nanoridge. (d) PL spectra of the transferred InP/ InGaAs nanoridge under different excitation levels. (e) Emission spectra of the InP/InGaAs nanoridge at increasing excitation levels at 4.5 K.
    (Color online) (a) SEM image of III–V nanowires on the SOI substrate. (b) SEM images of III–V nanowires on the SOI substrate after etching. (c) The FDTD simulation results of a III–V nanowire on the SOI substrate after etching.
    Fig. 11. (Color online) (a) SEM image of III–V nanowires on the SOI substrate. (b) SEM images of III–V nanowires on the SOI substrate after etching. (c) The FDTD simulation results of a III–V nanowire on the SOI substrate after etching.
    Wenyu Yang, Yajie Li, Fangyuan Meng, Hongyan Yu, Mengqi Wang, Pengfei Wang, Guangzhen Luo, Xuliang Zhou, Jiaoqing Pan. III–V compound materials and lasers on silicon[J]. Journal of Semiconductors, 2019, 40(10): 101305
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