• Photonics Research
  • Vol. 5, Issue 6, 702 (2017)
Yiding Lin1、2、3, Kwang Hong Lee2, Shuyu Bao1、2, Xin Guo1, Hong Wang1, Jurgen Michel2、4, and Chuan Seng Tan1、2、*
Author Affiliations
  • 1School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
  • 2Low Energy Electronic Systems (LEES), Singapore-MIT Alliance for Research and Technology, Singapore 138602, Singapore
  • 3e-mail: liny0075@e.ntu.edu.sg
  • 4Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
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    DOI: 10.1364/PRJ.5.000702 Cite this Article Set citation alerts
    Yiding Lin, Kwang Hong Lee, Shuyu Bao, Xin Guo, Hong Wang, Jurgen Michel, Chuan Seng Tan. High-efficiency normal-incidence vertical p-i-n photodetectors on a germanium-on-insulator platform[J]. Photonics Research, 2017, 5(6): 702 Copy Citation Text show less

    Abstract

    In this paper, normal incidence vertical p-i-n photodetectors on a germanium-on-insulator (GOI) platform were demonstrated. The vertical p-i-n structure was realized by ion-implanting boron and arsenic at the bottom and top of the Ge layer, respectively, during the GOI fabrication. Abrupt doping profiles were verified in the transferred high-quality Ge layer. The photodetectors exhibit a dark current density of ~47 mA/cm2 at ?1 V and an optical responsivity of 0.39 A/W at 1550 nm, which are improved compared with state-of-the-art demonstrated GOI photodetectors. An internal quantum efficiency of ~97% indicates excellent carrier collection efficiency of the device. The photodetectors with mesa diameter of 60 μm exhibit a 3 dB bandwidth of ~1 GHz, which agrees well with theoretical calculations. The bandwidth is expected to improve to ~32 GHz with mesa diameter of 10 μm. This work could be similarly extended to GOI platforms with other intermediate layers and potentially enrich the functional diversity of GOI for near-infrared sensing and communication integrated with Ge CMOS and mid-infrared photonics.
    Idark=BT1.5eEakT(eqV2kT1),(1)

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    r=|n1n2n1+n2|2,(2)

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    R=λ(μm)1.24(1r)ηintexp(αGednGe)[1exp(αGediGe)],(3)

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    f3dB=(1ftransit2+fRC2)1/2,(5.1)

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    fRC=12πRC,(5.2)

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    ftransit=0.45vsatdiGe,(5.3)

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    C=ACj60μm+Cp,(6)

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    Yiding Lin, Kwang Hong Lee, Shuyu Bao, Xin Guo, Hong Wang, Jurgen Michel, Chuan Seng Tan. High-efficiency normal-incidence vertical p-i-n photodetectors on a germanium-on-insulator platform[J]. Photonics Research, 2017, 5(6): 702
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