• Chinese Optics Letters
  • Vol. 20, Issue 3, 031302 (2022)
Liping Zhou1、2, Chengli Wang1、2, Ailun Yi1、3, Chen Shen1, Yifan Zhu1、2, Kai Huang1, Min Zhou1, Jiaxiang Zhang1、2、*, and Xin Ou1、2、**
Author Affiliations
  • 1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3XOI Technology Co., Ltd., Shanghai 201899, China
  • show less
    DOI: 10.3788/COL202220.031302 Cite this Article Set citation alerts
    Liping Zhou, Chengli Wang, Ailun Yi, Chen Shen, Yifan Zhu, Kai Huang, Min Zhou, Jiaxiang Zhang, Xin Ou. Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator[J]. Chinese Optics Letters, 2022, 20(3): 031302 Copy Citation Text show less
    References

    [1] B.-S. Song, T. Asano, S. Jeon, H. Kim, C. Chen, D. D. Kang, S. Noda. Ultrahigh-Q photonic crystal nanocavities based on 4H silicon carbide. Optica, 6, 991(2019).

    [2] C. Wang, Z. Fang, A. Yi, B. Yang, Z. Wang, L. Zhou, C. Shen, Y. Zhu, Y. Zhou, R. Bao, Z. Li, Y. Chen, K. Huang, J. Zhang, Y. Cheng, X. Ou. High-Q microresonators on 4H-silicon-carbide-on-insulator platform for nonlinear photonics. Light Sci. Appl., 10, 139(2021).

    [3] H. Sato, M. Abe, I. Shoji, J. Suda, T. Kondo. Accurate measurements of second-order nonlinear optical coefficients of 6H and 4H silicon carbide. J. Opt. Soc. Am. B, 26, 1892(2009).

    [4] Y. Zheng, M. Pu, A. Yi, X. Ou, H. Ou. 4H-SiC microring resonators for nonlinear integrated photonics. Opt. Lett., 44, 5784(2019).

    [5] M. A. Guidry, K. Y. Yang, D. M. Lukin, A. Markosyan, J. Yang, M. M. Fejer, J. Vučković. Optical parametric oscillation in silicon carbide nanophotonics. Optica, 7, 1139(2020).

    [6] S. Castelletto, A. Boretti. Silicon carbide color centers for quantum applications. J. Phys., 2, 022001(2020).

    [7] M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, J. Wrachtrup. Material platforms for spin-based photonic quantum technologies. Nat. Rev. Mater., 3, 38(2018).

    [8] S. Castelletto, B. C. Johnson, V. Ivady, N. Stavrias, T. Umeda, A. Gali, T. Ohshima. A silicon carbide room-temperature single-photon source. Nat. Mater., 13, 151(2014).

    [9] D. J. Christle, A. L. Falk, P. Andrich, P. V. Klimov, J. U. Hassan, N. T. Son, E. Janzén, T. Ohshima, D. D. Awschalom. Isolated electron spins in silicon carbide with millisecond coherence times. Nat. Mater., 14, 160(2015).

    [10] D. M. Lukin, C. Dory, M. A. Guidry, K. Y. Yang, S. D. Mishra, R. Trivedi, M. Radulaski, S. Sun, D. Vercruysse, G. H. Ahn, J. Vučković. 4H-silicon-carbide-on-insulator for integrated quantum and nonlinear photonics. Nat. Photonics, 14, 330(2019).

    [11] D. D. Awschalom, R. Hanson, J. Wrachtrup, B. B. Zhou. Quantum technologies with optically interfaced solid-state spins. Nat. Photonics, 12, 516(2018).

    [12] B. Lienhard, T. Schröder, S. Mouradian, F. Dolde, T. T. Tran, I. Aharonovich, D. Englund. Bright and photostable single-photon emitter in silicon carbide. Optica, 3, 768(2016).

    [13] N. Morioka, C. Babin, R. Nagy, I. Gediz, E. Hesselmeier, D. Liu, M. Joliffe, M. Niethammer, D. Dasari, V. Vorobyov, R. Kolesov, R. Stohr, J. Ul-Hassan, N. T. Son, T. Ohshima, P. Udvarhelyi, G. Thiering, A. Gali, J. Wrachtrup, F. Kaiser. Spin-controlled generation of indistinguishable and distinguishable photons from silicon vacancy centres in silicon carbide. Nat. Commun., 11, 2516(2020).

    [14] M. Widmann, S.-Y. Lee, T. Rendler, N. T. Son, H. Fedder, S. Paik, L.-P. Yang, N. Zhao, S. Yang, I. Booker, A. Denisenko, M. Jamali, S. A. Momenzadeh, I. Gerhardt, T. Ohshima, A. Gali, E. Janzén, J. Wrachtrup. Coherent control of single spins in silicon carbide at room temperature. Nat. Mater., 14, 164(2014).

    [15] R. Nagy, M. Niethammer, M. Widmann, Y. C. Chen, P. Udvarhelyi, C. Bonato, J. U. Hassan, R. Karhu, I. G. Ivanov, N. T. Son, J. R. Maze, T. Ohshima, O. O. Soykal, A. Gali, S. Y. Lee, F. Kaiser, J. Wrachtrup. High-fidelity spin and optical control of single silicon-vacancy centres in silicon carbide. Nat. Commun., 10, 1954(2019).

    [16] K. Sakoda, T. Kuroda, N. Ikeda, T. Mano, Y. Sugimoto, T. Ochiai, K. Kuroda, S. Ohkouchi, N. Koguchi, K. Asakawa. Purcell effect of GaAs quantum dots by photonic crystal microcavities. Chin. Opt. Lett., 7, 879(2009).

    [17] L. Fang, X. Gan, J. Zhao. High-Q factor photonic crystal cavities with cut air holes [Invited]. Chin. Opt. Lett., 18, 111402(2020).

    [18] A. Sipahigil, R. E. Evans, D. D. Sukachev, M. J. Burek, J. Borregaard, M. K. Bhaskar, C. T. Nguyen, J. L. Pacheco, H. A. Atikian, C. Meuwly, R. M. Camacho, F. Jelezko, E. Bielejec, H. Park, M. Loncar, M. D. Lukin. An integrated diamond nanophotonics platform for quantum-optical networks. Science, 354, 847(2016).

    [19] A. L. Crook, C. P. Anderson, K. C. Miao, A. Bourassa, H. Lee, S. L. Bayliss, D. O. Bracher, X. Zhang, H. Abe, T. Ohshima, E. L. Hu, D. D. Awschalom. Purcell enhancement of a single silicon carbide color center with coherent spin control. Nano Lett., 20, 3427(2020).

    [20] J. L. Zhang, S. Sun, M. J. Burek, C. Dory, Y. K. Tzeng, K. A. Fischer, Y. Kelaita, K. G. Lagoudakis, M. Radulaski, Z. X. Shen, N. A. Melosh, S. Chu, M. Loncar, J. Vuckovic. Strongly cavity-enhanced spontaneous emission from silicon-vacancy centers in diamond. Nano Lett., 18, 1360(2018).

    [21] R. Ge, X. Yan, Y. Chen, X. Chen. Broadband and lossless lithium niobate valley photonic crystal waveguide [Invited]. Chin. Opt. Lett., 19, 060014(2021).

    [22] A. Yi, Y. Zheng, H. Huang, J. Lin, Y. Yan, T. You, K. Huang, S. Zhang, C. Shen, M. Zhou, W. Huang, J. Zhang, S. Zhou, H. Ou, X. Ou. Wafer-scale 4H-silicon carbide-on-insulator (4H–SiCOI) platform for nonlinear integrated optical devices. Opt. Mater., 107, 109990(2020).

    [23] C. Wang, C. Shen, A. Yi, S. Yang, L. Zhou, Y. Zhu, K. Huang, S. Song, M. Zhou, J. Zhang, X. Ou. Visible and near-infrared microdisk resonators on a 4H-silicon-carbide-on-insulator platform. Opt. Lett., 46, 2952(2021).

    [24] Y. Zheng, M. Pu, A. Yi, B. Chang, T. You, K. Huang, A. N. Kamel, M. R. Henriksen, A. A. Jørgensen, X. Ou, H. Ou. High-quality factor, high-confinement microring resonators in 4H-silicon carbide-on-insulator. Opt. Express, 27, 13053(2019).

    [25] J. Chan, M. Eichenfield, R. Camacho, O. Painter. Optical and mechanical design of a “zipper” photonic crystal optomechanical cavity. Opt. Express, 17, 3802(2009).

    [26] M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, O. Painter. Optomechanical crystals. Nature, 462, 78(2009).

    [27] M. Radulaski, T. M. Babinec, K. Müller, K. G. Lagoudakis, J. L. Zhang, S. Buckley, Y. A. Kelaita, K. Alassaad, G. Ferro, J. Vučković. Visible photoluminescence from cubic (3C) silicon carbide microdisks coupled to high quality whispering gallery modes. ACS Photonics, 2, 14(2014).

    [28] S. Castelletto, A. F. M. Almutairi, K. Kumagai, T. Katkus, Y. Hayasaki, B. C. Johnson, S. Juodkazis. Photoluminescence in hexagonal silicon carbide by direct femtosecond laser writing. Opt. Lett., 43, 6077(2018).

    [29] M. Rühl, C. Ott, S. Götzinger, M. Krieger, H. B. Weber. Controlled generation of intrinsic near-infrared color centers in 4H-SiC via proton irradiation and annealing. Appl. Phys. Lett., 113, 122102(2018).

    [30] S. Wang, M. Zhan, G. Wang, H. Xuan, W. Zhang, C. Liu, C. Xu, Y. Liu, Z. Wei, X. Chen. 4H-SiC: a new nonlinear material for midinfrared lasers. Laser Photonics Rev., 7, 831(2013).

    [31] M. N. Gadalla, A. S. Greenspon, R. K. Defo, X. Zhang, E. L. Hu. Enhanced cavity coupling to silicon vacancies in 4H silicon carbide using laser irradiation and thermal annealing. Proc. Natl. Acad. Sci. U. S. A., 118, e2021768118(2021).

    [32] A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, R. G. Beausoleil. Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity. Nat. Photonics, 5, 301(2011).

    [33] E. M. Purcell, E. Burstein, C. Weisbuch. Spontaneous emission probabilities at radio frequencies. Confined Electrons and Photons: New Physics and Applications, 839(1995).

    [34] A. Lohrmann, T. J. Karle, V. K. Sewani, A. Laucht, M. Bosi, M. Negri, S. Castelletto, S. Prawer, J. C. McCallum, B. C. Johnson. Integration of single-photon emitters into 3C-SiC microdisk resonators. ACS Photonics, 4, 462(2017).

    [35] S. Kiravittaya, H. S. Lee, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, A. Rastelli, O. G. Schmidt. Tuning optical modes in slab photonic crystal by atomic layer deposition and laser-assisted oxidation. J. Appl. Phys., 109, 053115(2011).

    [36] X. Wu, T. Fan, A. A. Eftekhar, A. Adibi. High-Q microresonators integrated with microheaters on a 3C-SiC-on-insulator platform. Opt. Lett., 44, 4941(2019).

    [37] X. Y. Lu, J. Y. Lee, P. X. L. Feng, Q. Lin. Silicon carbide microdisk resonator. Opt. Lett., 38, 1304(2013).

    [38] J. C. Lee, D. O. Bracher, S. Cui, K. Ohno, C. A. McLellan, X. Zhang, P. Andrich, B. Alemán, K. J. Russell, A. P. Magyar, I. Aharonovich, A. Bleszynski Jayich, D. Awschalom, E. L. Hu. Deterministic coupling of delta-doped nitrogen vacancy centers to a nanobeam photonic crystal cavity. Appl. Phys. Lett., 105, 261101(2014).

    Data from CrossRef

    [1] Rui Ge, Xiongshuo Yan, Zhaokang Liang, Hao Li, Jiangwei Wu, Xiangmin Liu, Yuping Chen, Xianfeng Chen. Large quality factor enhancement based on cascaded uniform lithium niobate bichromatic photonic crystal cavities. Optics Letters, 48, 113(2023).

    Liping Zhou, Chengli Wang, Ailun Yi, Chen Shen, Yifan Zhu, Kai Huang, Min Zhou, Jiaxiang Zhang, Xin Ou. Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator[J]. Chinese Optics Letters, 2022, 20(3): 031302
    Download Citation