• Chinese Optics Letters
  • Vol. 20, Issue 3, 031302 (2022)
Liping Zhou1、2, Chengli Wang1、2, Ailun Yi1、3, Chen Shen1, Yifan Zhu1、2, Kai Huang1, Min Zhou1, Jiaxiang Zhang1、2、*, and Xin Ou1、2、**
Author Affiliations
  • 1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3XOI Technology Co., Ltd., Shanghai 201899, China
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    DOI: 10.3788/COL202220.031302 Cite this Article Set citation alerts
    Liping Zhou, Chengli Wang, Ailun Yi, Chen Shen, Yifan Zhu, Kai Huang, Min Zhou, Jiaxiang Zhang, Xin Ou. Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator[J]. Chinese Optics Letters, 2022, 20(3): 031302 Copy Citation Text show less

    Abstract

    The 4H-silicon carbide on insulator (4H-SiCOI) has recently emerged as an attractive material platform for integrated photonics due to its excellent quantum and nonlinear optical properties. Here, we experimentally realize one-dimensional photonic crystal nanobeam cavities on the ion-cutting 4H-SiCOI platform. The cavities exhibit quality factors up to 6.1×103 and mode volumes down to 0.63 × (λ/n)3 in the visible and near-infrared wavelength range. Moreover, by changing the excitation laser power, the fundamental transverse-electric mode can be dynamically tuned by 0.6 nm with a tuning rate of 33.5 pm/mW. The demonstrated devices offer the promise of an appealing microcavity system for interfacing the optically addressable spin defects in 4H-SiC.
    V0=[ε(r)|E(r)|max(ε(r)|E(r)|)]2dV,

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    F=34π2(λn)3QV0.

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    Liping Zhou, Chengli Wang, Ailun Yi, Chen Shen, Yifan Zhu, Kai Huang, Min Zhou, Jiaxiang Zhang, Xin Ou. Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator[J]. Chinese Optics Letters, 2022, 20(3): 031302
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