Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator

Liping Zhou; Chengli Wang; Ailun Yi; Chen Shen; Yifan Zhu; Kai Huang; Min Zhou; Jiaxiang Zhang; Xin Ou

doi:10.3788/COL202220.031302

Journals >Chinese Optics Letters >Volume 20 >Issue 3 >Page 031302 > Article

Chinese Optics Letters
Vol. 20, Issue 3, 031302 (2022)

Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator

Liping Zhou^1、2, Chengli Wang^1、2, Ailun Yi^1、3, Chen Shen¹, Yifan Zhu^1、2, Kai Huang¹, Min Zhou¹, Jiaxiang Zhang^1、2、*, and Xin Ou^1、2、**

Author Affiliations

¹State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³XOI Technology Co., Ltd., Shanghai 201899, China

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DOI: 10.3788/COL202220.031302 Cite this Article Set citation alerts

Liping Zhou, Chengli Wang, Ailun Yi, Chen Shen, Yifan Zhu, Kai Huang, Min Zhou, Jiaxiang Zhang, Xin Ou. Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator[J]. Chinese Optics Letters, 2022, 20(3): 031302 Copy Citation Text

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