• Journal of Semiconductors
  • Vol. 42, Issue 6, 062801 (2021)
Kyuhyun Cha1 and Kwangsoo Kim2
Author Affiliations
  • 1Department of Electronic Engineering, Sogang University, Seoul 04107, Korea
  • 2Department of Electronic Engineering, Sogang University, Seoul 04107, Korea
  • show less
    DOI: 10.1088/1674-4926/42/6/062801 Cite this Article
    Kyuhyun Cha, Kwangsoo Kim. 3.3 kV 4H-SiC DMOSFET with a source-contacted dummy gate for high-frequency applications[J]. Journal of Semiconductors, 2021, 42(6): 062801 Copy Citation Text show less
    References

    [1] M Zhang, J Wei, H P Jiang et al. A new SiC trench MOSFET structure with protruded p-base for low oxide field and enhanced switching performance. IEEE Trans Device Mater Relib, 17, 432(2017).

    [2] J A Cooper, A Agarwal. SiC power-switching devices-the second electronics revolution. Proc IEEE, 90, 956(2002).

    [3] Y Du, S Baek, S Bhattacharya et al. High-voltage high-frequency transformer design for a 7.2 kV to 120 V/240 V 20 kVA solid state transformer. IECON 2010 – 36th Annual Conference on IEEE Industrial Electronics Society, 493(2010).

    [4] S Ozdemir, F Acar, U Selamoigullari. Comparison of silicon carbide MOSFET and IGBT based electric vehicle traction inverters. 2015 International Conference on Electrical Engineering and Informatics (ICEEI), 1(2015).

    [5] H Yano, H Nakao, T Hatayama et al. Increased channel mobility in 4H-SiC UMOSFETs using on-axis substrates. Mater Sci Forum, 556/557, 807(2007).

    [6] C T Banzhaf, M Grieb, A Trautmann et al. Characterization of diverse gate oxides on 4H-SiC 3D trench-MOS structures. Mater Sci Forum, 740–742, 691(2013).

    [7] A K Agarwal, R R Siergiej, S Seshadri et al. A critical look at the performance advantages and limitations of 4H-SiC power UMOSFET structures. 8th International Symposium on Power Semiconductor Devices and ICs (ISPSD), 70, 2732(1997).

    [8]

    [9] Q C J Zhang, J Duc, B Hull et al. CIMOSFET: A new MOSFET on SiC with a superior Ron·Qgd figure of merit. Mater Sci Forum, 821–823, 765(2015).

    [10] J Y Jiang, T L Wu, F Zhao et al. Numerical study of 4H-SiC UMOSFETs with split-gate and P+ shielding. Energies, 13, 1122(2020).

    [11] C Lombardi, S Manzini, A Saporito et al. A physically based mobility model for numerical simulation of nonplanar devices. IEEE Trans Comput-Aided Des Integr Circuits Syst, 7, 1164(1988).

    [12] T Hatakeyama, T Nishio, C Ota et al. Physical modeling and scaling properties of 4H-SiC power devices. International Congerence on Simulation of Semiconductor Processed and Devices, 171(2005).

    [13] Y Zhao, H Niwa, T Kimoto. Impact ionization coefficients of 4H-SiC in a wide temperature range. Jpn J Appl Phys, 58, 018001(2019).

    [14] P Vudumula, S Kotamraju. Design and optimization of 1.2-kV SiC planar inversion MOSFET using split dummy gate concept for high-frequency applications. IEEE Trans Electron Devices, 66, 5266(2019).

    [15] J Y Jiang, C F Huang, T L Wu et al. Simulation study of 4h-SiC trench MOSFETs with various gate structures. Electron Devices Technology and Manufacturing Conference (EDTM), 401(2019).

    [16] Y Sui, T Tsuji, J A Cooper. On-state characteristics of SiC power UMOSFETs on 115-μm drift layers. IEEE Electron Device Lett, 26, 255(2005).

    [17] V Šimonka, A Hössinger, J Weinbub et al. Growth rates of dry thermal oxidation of 4H-silicon carbide. J Appl Phys, 120, 135705(2016).

    [18] R Singh, A R Hefner. Reliability of SiC MOS devices. Solid-State Electron, 48, 1717(2004).

    [19] K Han, B J Baliga, W Sung. A novel 1.2 kV 4H-SiC buffered-gate (BG) MOSFET: Analysis and experimental results. IEEE Electron Device Lett, 39, 248(2018).

    [20]

    [21] J Wei, M Zhang, H P Jiang et al. Dynamic degradation in SiC trench MOSFET with a floating p-shield revealed with numerical simulations. IEEE Trans Electron Devices, 64, 2592(2017).

    [22]

    Kyuhyun Cha, Kwangsoo Kim. 3.3 kV 4H-SiC DMOSFET with a source-contacted dummy gate for high-frequency applications[J]. Journal of Semiconductors, 2021, 42(6): 062801
    Download Citation