Bo Gao, Tao Chen, Vanthanh Khuat, Jinhai Si, Xun Hou. Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching[J]. Chinese Optics Letters, 2016, 14(2): 021407
- Chinese Optics Letters
- Vol. 14, Issue 2, 021407 (2016)
Fig. 1. Schematic diagram of the fabrication of the SiC grating structures.
Fig. 2. Cross-section SEM images of the LISC zone (a) before and (b) after chemical-selective etching.
Fig. 3. SiC grating structures from (a) top view and (b) side view under a 20 ×
Fig. 4. (a) SiC grating structures with a 1.07 μm period observed under a microscope with 100 ×
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