Researching | Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching

Journals >Chinese Optics Letters >Volume 14 >Issue 2 >Page 021407 > Article

Chinese Optics Letters
Vol. 14, Issue 2, 021407 (2016)

Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching

Bo Gao, Tao Chen, Vanthanh Khuat, Jinhai Si^*, and Xun Hou

Author Affiliations

Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shaanxi Key Lab of Information Photonic Technique, School of Electronics & Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China

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DOI: 10.3788/COL201614.021407 Cite this Article Set citation alerts

Bo Gao, Tao Chen, Vanthanh Khuat, Jinhai Si, Xun Hou, "Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching," Chin. Opt. Lett. 14, 021407 (2016) Copy Citation Text

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[2] Youwang Hu, Haoming Yue, Ji’an Duan, Cong Wang, Jianying Zhou, Yunpeng Lu, Kai Yin, Xinran Dong, Wenyi Su, Xiaoyan Sun, "Experimental research of laser-induced periodic surface structures in a typical liquid by a femtosecond laser," Chin. Opt. Lett. 15, 021404 (2017)

[3] Tao Liu, Yongqing Huang, Jiarui Fei, Gang Wu, Xiaokai Ma, Xiaofeng Duan, Kai Liu, Xiaomin Ren, "Research on photodiode integrated with wide spectrum focusing reflector using nonperiodic subwavelength gratings," Chin. Opt. Lett. 16, 051301 (2018)

[4] Ming Yang, Tingshuai Li, Chuanke Wang, Jinwen Yang, Weiming Yang, Tao Yi, Shenye Liu, Shaoen Jiang, Yongkun Ding, "Characterization of electromagnetic pulses via arrays on ShenGuang-III laser facility laser," Chin. Opt. Lett. 14, 101402 (2016)

Data from CrossRef

[1] Wenhua Zhu, Bo Wang, Chenhao Gao, Kunhua Wen, Ziming Meng, Qu Wang, Xiangjun Xing, Li Chen, Liang Lei, Jinyun Zhou. Dual-function splitting of the embedded grating with connecting layer. Modern Physics Letters B, 1850129(2019).

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References (31)

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Bo Gao, Tao Chen, Vanthanh Khuat, Jinhai Si, Xun Hou, "Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching," Chin. Opt. Lett. 14, 021407 (2016)

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