Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching

Bo Gao; Tao Chen; Vanthanh Khuat; Jinhai Si; Xun Hou

doi:10.3788/COL201614.021407

Journals >Chinese Optics Letters >Volume 14 >Issue 2 >Page 021407 > Article

Chinese Optics Letters
Vol. 14, Issue 2, 021407 (2016)

Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching

Bo Gao, Tao Chen, Vanthanh Khuat, Jinhai Si^*, and Xun Hou

Author Affiliations

Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shaanxi Key Lab of Information Photonic Technique, School of Electronics & Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China

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DOI: 10.3788/COL201614.021407 Cite this Article Set citation alerts

Bo Gao, Tao Chen, Vanthanh Khuat, Jinhai Si, Xun Hou. Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching[J]. Chinese Optics Letters, 2016, 14(2): 021407 Copy Citation Text

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