Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching

Bo Gao; Tao Chen; Vanthanh Khuat; Jinhai Si; Xun Hou

doi:10.3788/COL201614.021407

Journals >Chinese Optics Letters >Volume 14 >Issue 2 >Page 021407 > Article

Chinese Optics Letters
Vol. 14, Issue 2, 021407 (2016)

Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching

Bo Gao, Tao Chen, Vanthanh Khuat, Jinhai Si^*, and Xun Hou

Author Affiliations

Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shaanxi Key Lab of Information Photonic Technique, School of Electronics & Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China

show less

DOI: 10.3788/COL201614.021407 Cite this Article Set citation alerts

Bo Gao, Tao Chen, Vanthanh Khuat, Jinhai Si, Xun Hou, "Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching," Chin. Opt. Lett. 14, 021407 (2016) Copy Citation Text

EndNote(RIS)

BibTex

Plain Text

show less

Cited By

Article index updated: Oct. 9, 2024

Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.

The article is cited by 30 article(s) from Web of Science.

The article is cited by 2 article(s) CLP online library. (Some content might be in Chinese.)

Bo Gao, Tao Chen, Vanthanh Khuat, Jinhai Si, Xun Hou, "Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching," Chin. Opt. Lett. 14, 021407 (2016)

Download Citation

EndNote(RIS)

BibTex

Plain Text

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information

微信扫一扫：分享

微信扫一扫：分享