All-silicon dual-cavity fiber-optic pressure sensor with ultralow pressure-temperature cross-sensitivity and wide working temperature range

Xue Wang; Junfeng Jiang; Shuang Wang; Kun Liu; Tiegen Liu

doi:10.1364/PRJ.414121

Journals >Photonics Research >Volume 9 >Issue 4 >Page 521 > Article

Photonics Research
Vol. 9, Issue 4, 521 (2021)

All-silicon dual-cavity fiber-optic pressure sensor with ultralow pressure-temperature cross-sensitivity and wide working temperature range

Xue Wang^1、2, Junfeng Jiang^1、3、*, Shuang Wang^1、4、*, Kun Liu¹, and Tiegen Liu^1、5、*

Author Affiliations

¹School of Precision Instrument and Opto-electronics Engineering, Tianjin Optical Fiber Sensing Engineering Center, Institute of Optical Fiber Sensing of Tianjin University, Key Laboratory of Opto-electronics Information Technology, Tianjin University, Tianjin 300072, China

²School of Electrical and Electronic Engineering, Engineering Research Center of Optoelectronic Devices and Communication Technology, Ministry of Education, Tianjin Key Laboratory of Film Electronic and Communication Devices, Tianjin University of Technology, Tianjin 300384, China

³e-mail: jiangjfjxu@tju.edu.cn

⁴e-mail: shuangwang@tju.edu.cn

⁵e-mail: tgliu@tju.edu.cn

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DOI: 10.1364/PRJ.414121 Cite this Article Set citation alerts

Xue Wang, Junfeng Jiang, Shuang Wang, Kun Liu, Tiegen Liu. All-silicon dual-cavity fiber-optic pressure sensor with ultralow pressure-temperature cross-sensitivity and wide working temperature range[J]. Photonics Research, 2021, 9(4): 521 Copy Citation Text

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