Shanshan Mao, Yanqiu Li, Jiahua Jiang, Shihuan Shen, Ke Liu, Meng Zheng. Design of a hyper-numerical-aperture deep ultraviolet lithography objective with freeform surfaces[J]. Chinese Optics Letters, 2018, 16(3): 030801
- Chinese Optics Letters
- Vol. 16, Issue 3, 030801 (2018)
Fig. 1. Layout of the initial aspheric PO. The red dots represent aspheric surfaces.
Fig. 2. Lens-form parameters of a single element in aspheric PO: (a) | Δ w j | | Δ s j |
Fig. 3. Aspheric PO structure after removing one element.
Fig. 4. Aspheric PO structure after removing two elements.
Fig. 5. (a) Aspheric PO sampled fields and (b) footprint map.
Fig. 6. FFSs PO sampled fields.
Fig. 7. PO structure with four FFSs.
Fig. 8. Modulation transfer function plot.
Fig. 9. FFSs PO footprint map.
Fig. 10. (a) Wavefront RMS error and (b) distortion in the full image field.
Fig. 11. Local curvature of FFSs in the X Y
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Table 1. Lens-form Parameter Values of Aspheric Surfaces
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Table 2. Optical Characteristics of ASPSs and FFSs POs
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