Longbin Jiang, Runze Ding, Chenyang Ding, Xiaofeng Yang, Yunlang Xu. Research Progress on Stage Control Methods for a Lithography Machine[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922003
- Laser & Optoelectronics Progress
- Vol. 59, Issue 9, 0922003 (2022)
![Schematic diagram of step and scan projection lithography machine[10]](/richHtml/lop/2022/59/9/0922003/img_01.jpg)
Fig. 1. Schematic diagram of step and scan projection lithography machine[10]
![Schematic diagram of two wafer stages of lithography machine[14]](/richHtml/lop/2022/59/9/0922003/img_02.jpg)
Fig. 2. Schematic diagram of two wafer stages of lithography machine[14]
Fig. 3. Schematic diagram of lithography machine working principle
Fig. 4. Schematic diagram of motion track of wafer stage
Fig. 5. Schematic diagram of 3-DoF motion system[10]
Fig. 6. Schematic diagram of multi-input multi-output control based on decoupling[10]
Fig. 7. Block diagram of single degree of freedom motion control
Fig. 8. Block diagram of acceleration feedforward control
Fig. 9. Block diagram of iterative learning control
Fig. 10. Block diagram of nonlinear PID controller[14]
Fig. 11. Schematic diagram of single degree of freedom flexible system[39]
Fig. 12. Block diagram of DISO control[39]
Fig. 13. Block diagram of feedforward and feedback combined control[40]
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Table 1. Empirical calculation formula of control parameters [14]
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