• Journal of Semiconductors
  • Vol. 42, Issue 5, 051801 (2021)
Xiaolong Cai1、2、3, Chenglin Du2、3, Zixuan Sun2、3, Ran Ye2、3, Haijun Liu2, Yu Zhang2, Xiangyang Duan2, and Hai Lu1
Author Affiliations
  • 1School of Electronic Science and Engineering, Nanjing University, Nanjing 210093 China
  • 2Architecture Team, Wireless Product Planning Department, ZTE Corporation, Nanjing 210012, China
  • 3State Key Laboratory of Mobile Network and Mobile Multimedia Technology, Shenzhen 518057, China
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    DOI: 10.1088/1674-4926/42/5/051801 Cite this Article
    Xiaolong Cai, Chenglin Du, Zixuan Sun, Ran Ye, Haijun Liu, Yu Zhang, Xiangyang Duan, Hai Lu. Recent progress of physical failure analysis of GaN HEMTs[J]. Journal of Semiconductors, 2021, 42(5): 051801 Copy Citation Text show less

    Abstract

    Gallium nitride (GaN)-based high-electron mobility transistors (HEMTs) are widely used in high power and high frequency application fields, due to the outstanding physical and chemical properties of the GaN material. However, GaN HEMTs suffer from degradations and even failures during practical applications, making physical analyses of post-failure devices extremely significant for reliability improvements and further device optimizations. In this paper, common physical characterization techniques for post failure analyses are introduced, several failure mechanisms and corresponding failure phenomena are reviewed and summarized, and finally device optimization methods are discussed.
    $ 2{\rm{A}}{{\rm{l}}_x}{\rm{G}}{{\rm{a}}_1}_{-x}{\rm{N}} + 3{{\rm{H}}_2}{\rm{O}} = x{\rm{A}}{{\rm{l}}_2}{{\rm{O}}_3} + (1-x){\rm{G}}{{\rm{a}}_2}{{\rm{O}}_3} + {{\rm{N}}_2} \uparrow +\, 3{{\rm{H}}_2} \uparrow . $ (1)

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    Xiaolong Cai, Chenglin Du, Zixuan Sun, Ran Ye, Haijun Liu, Yu Zhang, Xiangyang Duan, Hai Lu. Recent progress of physical failure analysis of GaN HEMTs[J]. Journal of Semiconductors, 2021, 42(5): 051801
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