Yitian Bao, Xiaorui Wang, Shijie Xu. Sub-bandgap refractive indexes and optical properties of Si-doped β-Ga2O3 semiconductor thin films[J]. Journal of Semiconductors, 2022, 43(6): 062802
- Journal of Semiconductors
- Vol. 43, Issue 6, 062802 (2022)
![(Color online) The experimental (solid squares) and calculated (solid line) refractive indexes of β-Ga2O3 thin film as a function of photon energy. The experimental data were from Ref. [17], while the solid line was fitted with Eq. (1).](/richHtml/jos/2022/43/6/062802/img_1.jpg)
Fig. 1. (Color online) The experimental (solid squares) and calculated (solid line) refractive indexes of β -Ga2O3 thin film as a function of photon energy. The experimental data were from Ref. [17 ], while the solid line was fitted with Eq. (1).
![(Color online) The measured transmission spectra (solid squares) and corresponding fitting curves (red solid lines) of the β-Ga2O3 thin films. The experimental spectra were measured by Hu et al.[4], while the fitting curves were obtained with Eq. (2) described in the text.](/richHtml/jos/2022/43/6/062802/img_2.jpg)
Fig. 2. (Color online) The measured transmission spectra (solid squares) and corresponding fitting curves (red solid lines) of the β -Ga2O3 thin films. The experimental spectra were measured by Hu et al .[4 ], while the fitting curves were obtained with Eq. (2) described in the text.
![(Color online) Measured (open circles) and calculated (solid lines) sub-bandgap absorption coefficients of β-Ga2O3 thin film with an impurity density of 2.52 × 1024 m–3. Note that the plot is drawn in a semi-logarithmic scale. The original experimental data was from Ref. [29].](/Images/icon/loading.gif){kind=icon}
Fig. 3. (Color online) Measured (open circles) and calculated (solid lines) sub-bandgap absorption coefficients of β -Ga2O3 thin film with an impurity density of 2.52 × 1024 m–3. Note that the plot is drawn in a semi-logarithmic scale. The original experimental data was from Ref. [29 ].
|
Table 1. Determined effective optical bandgap values vs. flow rates of SiH4.
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20