• Journal of Semiconductors
  • Vol. 42, Issue 6, 062802 (2021)
Mahmoud Shaban1、2
Author Affiliations
  • 1Department of Electrical Engineering, College of Engineering, Qassim University, Unaizah 56452, Saudi Arabia
  • 2Department of Electrical Engineering, Faculty of Engineering, Aswan University, Aswan 81542, Egypt
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    DOI: 10.1088/1674-4926/42/6/062802 Cite this Article
    Mahmoud Shaban. Determination of trap density-of-states distribution of nitrogen-doped ultrananocrystalline diamond/hydrogenated amorphous carbon composite films[J]. Journal of Semiconductors, 2021, 42(6): 062802 Copy Citation Text show less

    Abstract

    Thin films comprising nitrogen-doped ultrananocrystalline diamond/hydrogenated amorphous-carbon (UNCD/a-C:H) composite films were experimentally investigated. The prepared films were grown on Si substrates by the coaxial arc plasma deposition method. They were characterized by temperature-dependent capacitance-frequency measurements in the temperature and frequency ranges of 300–400 K and 50 kHz–2 MHz, respectively. The energy distribution of trap density of states in the films was extracted using a simple technique utilizing the measured capacitance-frequency characteristics. In the measured temperature range, the energy-distributed traps exhibited Gaussian-distributed states with peak values lie in the range: 2.84 × 1016–2.73 × 1017 eV–1cm–3 and centered at energies of 120–233 meV below the conduction band. These states are generated due to a large amount of sp2-C and π-bond states, localized in GBs of the UNCD/a-C:H film. The attained defect parameters are accommodating to understand basic electrical properties of UNCD/a-C:H composite and can be adopted to suppress defects in the UNCD-based materials.
    $ \frac{1}{{C}^{2}}=\frac{2}{q{A}^{2}}\frac{\left({\varepsilon }_{1}{{N}_{1}+\varepsilon }_{2}{N}_{2}\right)({V}_{\rm{bi}}-V)}{{\varepsilon }_{1}{\varepsilon }_{2}{N}_{1}{N}_{2}} , $ (1)

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    $ {W}_{1}=\sqrt{\frac{2{\varepsilon }_{1}{\varepsilon }_{2}{N}_{2}({V}_{\rm{bi}}-V)}{q{N}_{1}({\varepsilon }_{1}{N}_{1}+{\varepsilon }_{2}{N}_{2})}}, $ (2)

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    $ {W}_{2}=\sqrt{\frac{2{\varepsilon }_{1}{\varepsilon }_{2}{N}_{1}({V}_{\rm{bi}}-V)}{q{N}_{2}({\varepsilon }_{1}{N}_{1}+{\varepsilon }_{2}{N}_{2})}}, $ (3)

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    $ \tau =\frac{1}{{\sigma }_{\rm{n}}{v}_{\rm{th}}{N}_{\rm{c}}}{\rm{e}}^{\frac{{E}_{\rm{a}}}{KT}} , $ (4)

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    $ {f}_{\rm{m}}={\upsilon }_{0}{\rm{e}}^{-\frac{{E}_{\rm{a}}}{KT}} . $ (5)

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    $ {E}_{\rm{f}}=KT{\rm{ln}}\frac{{\upsilon }_{0}}{f} . $ (6)

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    $ {N_{\rm{t}}}\left( {{E_{\rm{f}}}} \right) = - \frac{{{V_{{\rm{bi}}}}}}{{qKTW}}\frac{{f{\rm{d}}C}}{{{\rm{d}}f}}. $ (7)

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    $ {N}_{\rm{t}}\left(E\right)={N}_{\rm{G}}{\rm{e}}^{-\frac{{(E-{E}_{\rm{t}})}^{2}}{{\sigma }^{2}}}, $ (8)

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    Mahmoud Shaban. Determination of trap density-of-states distribution of nitrogen-doped ultrananocrystalline diamond/hydrogenated amorphous carbon composite films[J]. Journal of Semiconductors, 2021, 42(6): 062802
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