• Journal of Semiconductors
  • Vol. 43, Issue 3, 032801 (2022)
Lan Bi1、2, Yixu Yao1、2, Qimeng Jiang1、2, Sen Huang1、2, Xinhua Wang1、2, Hao Jin1、2, Xinyue Dai1、2, Zhengyuan Xu1, Jie Fan1、2, Haibo Yin1、2, Ke Wei1、2, and Xinyu Liu1、2
Author Affiliations
  • 1High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 2Institute of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.1088/1674-4926/43/3/032801 Cite this Article
    Lan Bi, Yixu Yao, Qimeng Jiang, Sen Huang, Xinhua Wang, Hao Jin, Xinyue Dai, Zhengyuan Xu, Jie Fan, Haibo Yin, Ke Wei, Xinyu Liu. Instability of parasitic capacitance in T-shape-gate enhancement-mode AlGaN/GaN MIS-HEMTs[J]. Journal of Semiconductors, 2022, 43(3): 032801 Copy Citation Text show less
    References

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    [3] I C Kizilyalli, Y A Xu, E Carlson et al. Current and future directions in power electronic devices and circuits based on wide band-gap semiconductors. 2017 IEEE 5th Work Wide Bandgap Power Devices Appl, 417(2017).

    [4] K J Chen, O Häberlen, A Lidow et al. GaN-on-Si power technology: Devices and applications. IEEE Trans Electron Devices, 64, 779(2017).

    [5] W Saito, T Nitta, Y Kakiuchi et al. Suppression of dynamic on-resistance increase and gate charge measurements in high-voltage GaN-HEMTs with optimized field-plate structure. IEEE Trans Electron Devices, 54, 1825(2007).

    [6] R M Chu, A Corrion, M Chen et al. 1200-V normally off GaN-on-Si field-effect transistors with low dynamic on -resistance. IEEE Electron Device Lett, 32, 632(2011).

    [7] X B Ma, J C Zhang, L L Guo et al. Effects of passivation and FP structure on current collapse in an AlGaN/GaN HEMT. Chin J Semicond, 28, 73(2007).

    [8] Y Lei, u H Lu. Influence of field plate on surface-state-related lag characteristics of AlGaN/GaN HEMT. J Semicond, 36, 074007(2015).

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    [10] R Zhao, S Huang, X H Wang et al. Interface charge engineering in down-scaled AlGaN (<6 nm)/GaN heterostructure for fabrication of GaN-based power HEMTs and MIS-HEMTs. Appl Phys Lett, 116, 103502(2020).

    [11] S Yang, Z K Tang, M Y Hua et al. Investigation of SiNx and AlN passivation for AlGaN/GaN high-electron-mobility transistors: Role of interface traps and polarization charges. IEEE J Electron Devices Soc, 8, 358(2020).

    [12] A G Viey, W Vandendaele, M A Jaud et al. Investigation of nBTI degradation on GaN-on-Si E-mode MOSc-HEMT. 2019 IEEE International Electron Devices Meeting, 4.3.1(2019).

    [13] S Huang, X Liu, X Wang et al. Ultrathin-barrier AlGaN/GaN heterostructure: a recess-free technology for manufacturing high-performance GaN-on-Si power devices. IEEE Trans on Electron Devices, 65, 207(2018).

    [14] S Huang, X H Wang, X Y Liu et al. Monolithic integration of E/D-mode GaN MIS-HEMTs on ultrathin-barrier AlGaN/GaN heterostructure on Si substrates. Appl Phys Express, 12, 024001(2019).

    [15] S Huang, X Y Liu, X H Wang et al. High uniformity normally-OFF GaN MIS-HEMTs fabricated on ultra-thin-barrier AlGaN/GaN heterostructure. IEEE Electron Device Lett, 37, 1617(2016).

    [16] F Q Guo, S Huang, X H Wang et al. Suppression of interface states between nitride-based gate dielectrics and ultrathin-barrier AlGaN/GaN heterostructure with in situ remote plasma pretreatments. Appl Phys Lett, 118, 093503(2021).

    Lan Bi, Yixu Yao, Qimeng Jiang, Sen Huang, Xinhua Wang, Hao Jin, Xinyue Dai, Zhengyuan Xu, Jie Fan, Haibo Yin, Ke Wei, Xinyu Liu. Instability of parasitic capacitance in T-shape-gate enhancement-mode AlGaN/GaN MIS-HEMTs[J]. Journal of Semiconductors, 2022, 43(3): 032801
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