Accurate extraction of fabricated geometry using optical measurement

Yufei Xing; Jiaxing Dong; Sarvagya Dwivedi; Umar Khan; Wim Bogaerts

doi:10.1364/PRJ.6.001008

Journals >Photonics Research >Volume 6 >Issue 11 >Page 1008 > Article

Photonics Research
Vol. 6, Issue 11, 1008 (2018)

Accurate extraction of fabricated geometry using optical measurement

Yufei Xing^1、2、*, Jiaxing Dong^1、2, Sarvagya Dwivedi³, Umar Khan^1、2, and Wim Bogaerts^1、2

Author Affiliations

¹Photonics Research Group, Ghent University-IMEC, Ghent, Belgium

²Center of Nano and Biophotonics, Ghent, Belgium

³Electrical and Computer Engineering Department, University of California Santa Barbara, Santa Barbara, California 93106-9560, USA

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DOI: 10.1364/PRJ.6.001008 Cite this Article Set citation alerts

Yufei Xing, Jiaxing Dong, Sarvagya Dwivedi, Umar Khan, Wim Bogaerts. Accurate extraction of fabricated geometry using optical measurement[J]. Photonics Research, 2018, 6(11): 1008 Copy Citation Text

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Yufei Xing, Jiaxing Dong, Sarvagya Dwivedi, Umar Khan, Wim Bogaerts. Accurate extraction of fabricated geometry using optical measurement[J]. Photonics Research, 2018, 6(11): 1008

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