Study on Deep Ultraviolet Computational Lithography Techniques

Guodong Chen; Zinan Zhang; Sikun Li; Xiangzhao Wang

doi:10.3788/LOP202259.0922007

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 9 >Page 0922007 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 9, 0922007 (2022)

Study on Deep Ultraviolet Computational Lithography Techniques

Guodong Chen^1、2, Zinan Zhang^1、2, Sikun Li^1、2, and Xiangzhao Wang^1、2、*

Author Affiliations

¹Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

show less

DOI: 10.3788/LOP202259.0922007 Cite this Article Set citation alerts

Guodong Chen, Zinan Zhang, Sikun Li, Xiangzhao Wang. Study on Deep Ultraviolet Computational Lithography Techniques[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922007 Copy Citation Text

show less

Cited By

Article index updated: May. 20, 2024

Citation counts are provided from Researching.

The article is cited by 7 article(s) from Researching.

Guodong Chen, Zinan Zhang, Sikun Li, Xiangzhao Wang. Study on Deep Ultraviolet Computational Lithography Techniques[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922007

Download Citation

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information