Study on Functional Relationship between Transmitted Wavefront Zernike Coefficients and Wavelengths

Qiyuan Zhang; Sen Han; Shouhong Tang; Chunhua Luo; Yuegang Fu

doi:10.3788/AOS201838.0212002

[1] Shan B Z, Wang S Y, Niu H B et al. Zernike polynomial fitting method and its application[J]. Optics and Precision Engineering, 10, 318-323(2002).

[2] Shao J, Ma D M, Nie Z W. Aberration analysis for annular pupils by different Zernike polynomials[J]. Journal of Applied Optics, 31, 544-548(2010).

[3] Hou X, Wu F, Yang L et al. Effect of central obscuration interferograms fitted with Zernike circle polynomials on calculating Seidel aberrations[J]. Acta Optica Sinica, 26, 54-60(2006).

[4] Huang Y. Study on optimization of full field aberration of projection lens based on the extended Zernike polynomials[D]. Beijing: University of Chinese Academy of Sciences, 8-22(2015).

[5] Wyant J C. XI:[C]. Creath K. Basic wavefront aberration theory for optical metrology. Applied Optics & Optical Engineering, 2(1992).

[6] Chen L X, Hu X C, Han K et al. Improvement method for fitting high-frequency phase by Zernike polynomials[J]. Acta Optica Sinica, 36, 0314001(2016).

[7] Yu X. Research on technology of computer aided alignment of off-axis four-mirror anastigmat optical system[D]. Beijing: University of Chinese Academy of Sciences, 34-39(2015).

[8] Gong D, Tian T Y, Wang H. Computer-aided alignment of off-axis three-mirror system by using Zernike coefficients[J]. Optics and Precision Engineering, 18, 1754-1759(2010).

[9] Mahajan V N. Zernike polynomials and wavefront fitting[M]. ∥John Wiley & Sons, 498-546(2006).

[10] Feng J, Bai Y, Xing Y W. Fitting accuracy of wavefront using Zernike polynomials[J]. Electro-Optic Technology Application, 26, 31-34(2011).

[11] Chen L F, Yang J Y, Cui S et al. Matlab simulation of curve fitting based on least-squares[J]. Journal of Shenyang Normal University(Natural Science Edition), 32, 75-79(2014).

[12] Song X X. A general data fitting method based on Matlab[J]. Journal of Shanxi Datong University (Natural Science), 30, 1-3(2014).

[13] Wang W S, Liu D M, Xiang Y et al[M]. Applied optics, 167-177(2010).

[14] Han S, Joseph A, Artur G et al. Design of an interferometer for the measurement of long radius optics[C]. SPIE, 3966, 426-435(2000).