• Journal of Semiconductors
  • Vol. 43, Issue 6, 062303 (2022)
Xuyang Wang1、2、3, He Jia3, Junhui Li3, Yumei Guo3, and Yu Liu1
Author Affiliations
  • 1State Key Laboratory on Integrated Optoelectronics, Institution of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing Shiweitong Science & Technology Co., Ltd. , Beijing 100176, China
  • show less
    DOI: 10.1088/1674-4926/43/6/062303 Cite this Article
    Xuyang Wang, He Jia, Junhui Li, Yumei Guo, Yu Liu. Optical transmitter module with hybrid integration of DFB laser diode and proton-exchanged LiNbO3 modulator chip[J]. Journal of Semiconductors, 2022, 43(6): 062303 Copy Citation Text show less
    References

    [1] G L Li, P K L Yu. Optical intensity modulators for digital and analog applications. J Lightwave Technol, 21, 2010(2003).

    [2] N Dagli. Wide-bandwidth lasers and modulators for RF photonics. IEEE Trans Microw Theory Tech, 47, 1151(1999).

    [3] J N Huang, C Li, R G Lu et al. Beyond the 100 Gbaud directly modulated laser for short reach applications. J Semicond, 42, 041306(2021).

    [4] D P Liu, J Tang, Y Meng et al. Ultra-low Vpp and high-modulation-depth InP-based electro–optic microring modulator. J Semicond, 42, 082301(2021).

    [5] X X Wang, P O Weigel, J Zhao et al. Achieving beyond-100-GHz large-signal modulation bandwidth in hybrid silicon photonics Mach Zehnder modulators using thin film lithium niobate. APL Photonics, 4, 096101(2019).

    [6] E L Wooten, K M Kissa, A Yi-Yan et al. A review of lithium niobate modulators for fiber-optic communications systems. IEEE J Sel Top Quantum Electron, 6, 69(2000).

    [7] D Marpaung, C Roeloffzen, R Heideman et al. Integrated microwave photonics. Laser Photonics Rev, 7, 506(2013).

    [8] Z Y Lu, Lu B, Y Luo et al. Design and research on small hybrid integrated teansmitter module of semiconductor and DFB laser. J Opto Laser, 32, 181(2021).

    [9] Y Li, T Lan, J Li et al. High-efficiency edge-coupling based on lithium niobate on an insulator wire waveguide. Appl Opt, 59, 6694(2020).

    [10] L Y Li, Y X Ma, Y S Zhang et al. Multi-tip edge coupler for integration of a distributed feedback semiconductor laser with a thin-film lithium niobate modulator. Appl Opt, 60, 4814(2021).

    [11] M Qiu. Vertically coupled photonic crystal optical filters. Opt Lett, 30, 1476(2005).

    [12] S Chakravarty, M Teng, R Safian et al. Hybrid material integration in silicon photonic integrated circuits. J Semicond, 42, 041303(2021).

    [13] K Matsumoto, Y Kanaya, J Kishikawa et al. Characteristics of film InP layer and Si substrate bonded interface bonded by wafer direct bonding. 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, 7375926(2015).

    [14] M A Olmstead, F S Ohuchi. Group III selenides: Controlling dimensionality, structure, and properties through defects and heteroepitaxial growth. J Vac Sci Technol A, 39, 020801(2021).

    [15]

    [16] J Zhang, C X Gao, M Y Xue et al. Research on frequency modulation character of the current driven DFB semiconductor laser. Mod Phys Lett B, 33, 1850422(2019).

    [17] R C Alferness. Waveguide electrooptic modulators. IEEE Trans Microwave Theory Tech, 30, 1121(1982).

    [18]

    [19]

    [20] L L Wang, T Kowalcyzk. A versatile bias control technique for any-point locking in lithium niobate Mach–Zehnder modulators. J Lightwave Technol, 28, 1703(2010).

    [21] G Yang, A V Sergienko, A Ndao. Tunable polarization mode conversion using thin-film lithium niobate ridge waveguide. Opt Express, 29, 18565(2021).

    [22] M Fukuma, J Noda. Optical properties of titanium-diffused LiNbO3 strip waveguides and their coupling-to-a-fiber characteristics. Appl Opt, 19, 591(1980).

    [23] G R Paz-Pujalt, D D Tuschel, G Braunstein et al. Characterization of proton exchange lithium niobate waveguides. J Appl Phys, 76, 3981(1994).

    [24] A Méndez, la Paliza G de, A García-Cabañes et al. Comparison of the electro-optic coefficient r33 in well-defined phases of proton exchanged LiNbO3 waveguides. Appl Phys B, 73, 485(2001).

    Xuyang Wang, He Jia, Junhui Li, Yumei Guo, Yu Liu. Optical transmitter module with hybrid integration of DFB laser diode and proton-exchanged LiNbO3 modulator chip[J]. Journal of Semiconductors, 2022, 43(6): 062303
    Download Citation