• Journal of Semiconductors
  • Vol. 43, Issue 6, 062303 (2022)
Xuyang Wang1、2、3, He Jia3, Junhui Li3, Yumei Guo3, and Yu Liu1
Author Affiliations
  • 1State Key Laboratory on Integrated Optoelectronics, Institution of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing Shiweitong Science & Technology Co., Ltd. , Beijing 100176, China
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    DOI: 10.1088/1674-4926/43/6/062303 Cite this Article
    Xuyang Wang, He Jia, Junhui Li, Yumei Guo, Yu Liu. Optical transmitter module with hybrid integration of DFB laser diode and proton-exchanged LiNbO3 modulator chip[J]. Journal of Semiconductors, 2022, 43(6): 062303 Copy Citation Text show less

    Abstract

    In this work, a hybrid integrated optical transmitter module was designed and fabricated. A proton-exchanged Mach–Zehnder lithium niobate (LiNbO3) modulator chip was chosen to enhance the output extinction ratio. A fiber was used to adjust the rotation of the polarization direction caused by the optical isolator. The whole optical path structure, including the laser chip, lens, fiber, and modulator chip, was simulated to achieve high optical output efficiency. After a series of process improvements, a module with an output extinction ratio of 34 dB and a bandwidth of 20.5 GHz (from 2 GHz) was obtained. The optical output efficiency of the whole module reached approximately 21%. The link performance of the module was also measured.
    $ \mathrm{S}\mathrm{F}\mathrm{D}{\mathrm{R}}_{3}=\frac{2}{3}\left[{\mathrm{I}\mathrm{I}\mathrm{P}}_{3}-\mathrm{N}\mathrm{F}-\left(-174\right)\right]\mathrm{d}\mathrm{B}\cdot {\mathrm{H}\mathrm{z}}^{\tfrac{2}{3}}]=112\,\mathrm{d}\mathrm{B}\cdot{\mathrm{H}\mathrm{z}}^{\tfrac{2}{3}} . $ (1)

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    Xuyang Wang, He Jia, Junhui Li, Yumei Guo, Yu Liu. Optical transmitter module with hybrid integration of DFB laser diode and proton-exchanged LiNbO3 modulator chip[J]. Journal of Semiconductors, 2022, 43(6): 062303
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