• Photonics Research
  • Vol. 5, Issue 6, B7 (2017)
Xiaochi Chen1、*, Colleen S. Fenrich2, Muyu Xue2, Ming-Yen Kao3, Kai Zang1, Ching-Ying Lu1, Edward T. Fei1, Yusi Chen1, Yijie Huo1, Theodore I. Kamins1, and James S. Harris1
Author Affiliations
  • 1Department of Electrical Engineering, Stanford University, Stanford, California 94305, USA
  • 2Department of Materials Science and Engineering, Stanford University, Stanford, California 94305, USA
  • 3Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan
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    DOI: 10.1364/PRJ.5.0000B7 Cite this Article Set citation alerts
    Xiaochi Chen, Colleen S. Fenrich, Muyu Xue, Ming-Yen Kao, Kai Zang, Ching-Ying Lu, Edward T. Fei, Yusi Chen, Yijie Huo, Theodore I. Kamins, James S. Harris. Tensile-strained Ge/SiGe multiple quantum well microdisks[J]. Photonics Research, 2017, 5(6): B7 Copy Citation Text show less
    References

    [1] R. E. Camacho-Aguilera, Y. Cai, N. Patel, J. T. Bessette, M. Romagnoli, L. C. Kimerling, J. Michel. An electrically pumped germanium laser. Opt. Express, 20, 11316-11320(2012).

    [2] R. Chen, H. Lin, Y. Huo, C. Hitzman, T. I. Kamins, J. S. Harris. Increased photoluminescence of strain-reduced, high-Sn composition Ge1−xSnx alloys grown by molecular beam epitaxy. Appl. Phys. Lett., 99, 181125(2011).

    [3] S. Al-Kabi, S. A. Ghetmiri, J. Margetis, T. Pham, Y. Zhou, W. Dou, B. Collier, R. Quinde, W. Du, A. Mosleh, J. Liu, G. Sun, R. A. Soref, J. Tolle, B. Li, M. Mortazavi, H. A. Naseem, S.-Q. Yu. An optically pumped 2.5  μm GeSn laser on Si operating at 110  K. Appl. Phys. Lett., 109, 171105(2016).

    [4] S. Wirths, R. Geiger, N. Von Den Driesch, G. Mussler, T. Stoica, S. Mantl, Z. Ikonic, M. Luysberg, S. Chiussi, J. Hartmann, H. Sigg, J. Faist, D. Buca, D. Grützmacher. Lasing in direct-bandgap GeSn alloy grown on Si. Nat. Photonics, 9, 88-92(2015).

    [5] M. Süess, R. Geiger, R. Minamisawa, G. Schiefler, J. Frigerio, D. Chrastina, G. Isella, R. Spolenak, J. Faist, H. Sigg. Analysis of enhanced light emission from highly strained germanium microbridges. Nat. Photonics, 7, 466-472(2013).

    [6] Y. Huo, H. Lin, R. Chen, M. Makarova, Y. Rong, M. Li, T. I. Kamins, J. Vuckovic, J. S. Harris. Strong enhancement of direct transition photoluminescence with highly tensile-strained Ge grown by molecular beam epitaxy. Appl. Phys. Lett., 98, 011111(2011).

    [7] A. Ghrib, M. El Kurdi, M. de Kersauson, M. Prost, S. Sauvage, X. Checoury, G. Beaudoin, I. Sagnes, P. Boucaud. Tensile-strained germanium microdisks. Appl. Phys. Lett., 102, 221112(2013).

    [8] W. Tsang. Extremely low threshold (AlGa)As modified multiquantum well heterostructure lasers grown by molecular-beam epitaxy. Appl. Phys. Lett., 39, 786-788(1981).

    [9] H. K. Choi, C. Wang. InGaAs/AlGaAs strained single quantum well diode lasers with extremely low threshold current density and high efficiency. Appl. Phys. Lett., 57, 321-323(1990).

    [10] Y.-H. Kuo, Y. K. Lee, Y. Ge, S. Ren, J. E. Roth, T. I. Kamins, D. A. Miller, J. S. Harris. Strong quantum-confined Stark effect in germanium quantum-well structures on silicon. Nature, 437, 1334-1336(2005).

    [11] E. T. Fei, X. Chen, K. Zang, Y. Huo, G. Shambat, G. Miller, X. Liu, R. Dutt, T. I. Kamins, J. Vuckovic, J. S. Harris. Investigation of germanium quantum-well light sources. Opt. Express, 23, 22424-22430(2015).

    [12] K. Zang, D. Zhang, Y. Huo, X. Chen, C.-Y. Lu, E. T. Fei, T. I. Kamins, X. Feng, Y. Huang, J. S. Harris. Microring bio-chemical sensor with integrated low dark current Ge photodetector. Appl. Phys. Lett., 106, 101111(2015).

    [13] P. Chaisakul, D. Marris-Morini, J. Frigerio, D. Chrastina, M.-S. Rouifed, S. Cecchi, P. Crozat, G. Isella, L. Vivien. Integrated germanium optical interconnects on silicon substrates. Nat. Photonics, 8, 482-488(2014).

    [14] G. Shambat, S.-L. Cheng, J. Lu, Y. Nishi, J. Vuckovic. Direct band Ge photoluminescence near 1.6  μm coupled to Ge-on-Si microdisk resonators. Appl. Phys. Lett., 97, 241102(2010).

    [15] X. Xu, T. Maruizumi, Y. Shiraki. Waveguide-integrated microdisk light-emitting diode and photodetector based on Ge quantum dots. Opt. Express, 22, 3902-3910(2014).

    [16] X. Chen, Y. Huo, E. T. Fei, G. Shambat, X. Liu, T. I. Kamins, J. Vuckovic, J. S. Harris. Room temperature photoluminescence from Ge/SiGe quantum well structure in microdisk resonator. Proceedings of Symposium on Photonics and Optoelectronics, 1-3(2012).

    [17] C. S. Fenrich, X. Chen, R. Chen, Y.-C. Huang, H. Chung, M.-Y. Kao, Y. Huo, T. Kamins, J. S. Harris. Strained pseudomorphic Ge1−xSnx multiple quantum well microdisk using SiNy stressor layer. ACS Photon., 3, 2231-2236(2016).

    [18] R. W. Millar, K. Gallacher, J. Frigerio, A. Ballabio, A. Bashir, I. MacLaren, G. Isella, D. J. Paul. Analysis of Ge micro-cavities with in-plane tensile strains above 2%. Opt. Express, 24, 4365-4374(2016).

    [19] A. Ghrib, M. De Kersauson, M. El Kurdi, R. Jakomin, G. Beaudoin, S. Sauvage, G. Fishman, G. Ndong, M. Chaigneau, R. Ossikovski, I. Sagnes. Control of tensile strain in germanium waveguides through silicon nitride layers. Appl. Phys. Lett., 100, 201104(2012).

    [20] G. Capellini, C. Reich, S. Guha, Y. Yamamoto, M. Lisker, M. Virgilio, A. Ghrib, M. El Kurdi, P. Boucaud, B. Tillack, T. Schroeder. Tensile Ge microstructures for lasing fabricated by means of a silicon complementary metal-oxide-semiconductor process. Opt. Express, 22, 399-410(2014).

    [21] A. Ghrib, M. El Kurdi, M. Prost, S. Sauvage, X. Checoury, G. Beaudoin, M. Chaigneau, R. Ossikovski, I. Sagnes, P. Boucaud. All-around SiN stressor for high and homogeneous tensile strain in germanium microdisk cavities. Adv. Opt. Mater., 3, 353-358(2015).

    [22] M.-Y. Kao, X. Chen, Y. Huo, C. Shang, M. Xue, K. Zang, C.-Y. Lu, E. T. Fei, Y. Chen, T. I. Kamins, J. S. Harris. Tensile-strained Ge/SiGe quantum-well microdisks with overlying SiNx stressors. Conference on Lasers and Electro-Optics (CLEO), SF1P-1(2016).

    [23] G. Katsaros, A. Rastelli, M. Stoffel, G. Isella, H. von Känel, A. Bittner, J. Tersoff, U. Denker, O. Schmidt, G. Costantini, K. Kern. Investigating the lateral motion of SiGe islands by selective chemical etching. Surf. Sci., 600, 2608-2613(2006).

    [24] S. McCall, A. Levi, R. Slusher, S. Pearton, R. Logan. Whispering-gallery mode microdisk lasers. Appl. Phys. Lett., 60, 289-291(1992).

    [25] C. Boztug, J. R. Sánchez-Pérez, F. Cavallo, M. G. Lagally, R. Paiella. Strained-germanium nanostructures for infrared photonics. ACS Nano, 8, 3136-3151(2014).

    [26] O. Pages, J. Souhabi, V. Torres, A. Postnikov, K. Rustagi. Re-examination of the SiGe Raman spectra: percolation/one-dimensional-cluster scheme and ab initio calculations. Phys. Rev. B, 86, 045201(2012).

    [27] F. Cerdeira, C. Buchenauer, F. H. Pollak, M. Cardona. Stress-induced shifts of first-order Raman frequencies of diamond- and zinc-blende-type semiconductors. Phys. Rev. B, 5, 580-593(1972).

    [28] R. K. Schaevitz, J. E. Roth, S. Ren, O. Fidaner, D. A. Miller. Material properties of Si-Ge/Ge quantum wells. IEEE J. Sel. Top. Quantum Electron., 14, 1082-1089(2008).

    [29] Y. Cai, Z. Han, X. Wang, R. E. Camacho-Aguilera, L. C. Kimerling, J. Michel, J. Liu. Analysis of threshold current behavior for bulk and quantum-well germanium laser structures. IEEE J. Sel. Top. Quantum Electron., 19, 1901009(2013).

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    Xiaochi Chen, Colleen S. Fenrich, Muyu Xue, Ming-Yen Kao, Kai Zang, Ching-Ying Lu, Edward T. Fei, Yusi Chen, Yijie Huo, Theodore I. Kamins, James S. Harris. Tensile-strained Ge/SiGe multiple quantum well microdisks[J]. Photonics Research, 2017, 5(6): B7
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