• Chinese Optics Letters
  • Vol. 19, Issue 8, 082504 (2021)
Zhicheng Dai1, Yushen Liu2, Guofeng Yang1、*, Feng Xie3, Chun Zhu1, Yan Gu1, Naiyan Lu1, Qigao Fan1, Yu Ding1, Yuhang Li1, Yingzhou Yu1, and Xiumei Zhang1
Author Affiliations
  • 1School of Science, Jiangsu Provincial Research Center of Light Industrial Optoelectronic Engineering and Technology, Jiangnan University, Wuxi 214122, China
  • 2School of Electronic and Information Engineering, Changshu Institute of Technology, Changshu 215556, China
  • 3The 38th Research Institute of China Electronics Technology Group Corporation, Hefei 230000, China
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    DOI: 10.3788/COL202119.082504 Cite this Article Set citation alerts
    Zhicheng Dai, Yushen Liu, Guofeng Yang, Feng Xie, Chun Zhu, Yan Gu, Naiyan Lu, Qigao Fan, Yu Ding, Yuhang Li, Yingzhou Yu, Xiumei Zhang. Carrier transport and photoconductive gain mechanisms of AlGaN MSM photodetectors with high Al Content[J]. Chinese Optics Letters, 2021, 19(8): 082504 Copy Citation Text show less

    Abstract

    We have fabricated the AlGaN solar-blind ultraviolet metal–semiconductor–metal (MSM) photodetectors (PDs) with an Al composition of 0.55. The surface roughness and dislocations of the high-Al-content Al0.55Ga0.45N epitaxial layer are analyzed by atomic force microscopy and transmission electron microscopy, respectively. The device exhibits high spectral responsivity and external quantum efficiency due to the photoconductive gain effect. The current reveals a strong dependence on high temperatures in the range of 4–10 V. Moreover, the Poole–Frenkel emission model and changing space charge regions are employed to explain the carrier transport and photoconductive gain mechanisms for the AlGaN PD, respectively.
    R=qλhc,

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    D*=R2qJd=R2qId/A,

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    IPF=CEexp[q(ϕtqE/πεsε0)kT],

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    m(T)E+n(T),

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    m(T)=qkTqπεsε0,

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    n(T)=qkTϕt+ln(C),

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    R=ΔIPopt=qVµeL(ηgτShc/λ+nPoptΔS),

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    Zhicheng Dai, Yushen Liu, Guofeng Yang, Feng Xie, Chun Zhu, Yan Gu, Naiyan Lu, Qigao Fan, Yu Ding, Yuhang Li, Yingzhou Yu, Xiumei Zhang. Carrier transport and photoconductive gain mechanisms of AlGaN MSM photodetectors with high Al Content[J]. Chinese Optics Letters, 2021, 19(8): 082504
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