[1] Zhao X, Tsai J M, Cai H et al. A nano-opto-mechanical pressure sensor via ring resonator[J]. Optics Express, 20, 8535-8542(2012).
[2] Chao Y C, Lai W J, Chen C Y et al. Low voltage active pressure sensor based on polymer space-charge-limited transistor[J]. Applied Physics Letters, 95, 253306(2009).
[3] Sander C S, Knutti J W, Meindl J D. A monolithic capacitive pressure sensor with pulse-period output[J]. IEEE Transactions on Electron Devices, 27, 927-930(1980).
[4] de Bruyker D, Puers R. Thermostatic control for temperature compensation of a silicon pressure sensor[J]. Sensors and Actuators A: Physical, 82, 120-127(2000).
[5] Oh M C, Kim J W, Kim K J et al. Optical pressure sensors based on vertical directional coupling with flexible polymer waveguides[J]. IEEE Photonics Technology Letters, 21, 501-503(2009).
[6] Donlagic D, Cibula E. All-fiber high-sensitivity pressure sensor with SiO2 diaphragm[J]. Optics Letters, 30, 2071-2073(2005).
[7] Liu Z M, Zhang Z B, Zhang X et al. Multimode optical filter based on waveguide side-coupled ring resonator[J]. Acta Optica Sinica, 40, 1123001(2020).
[8] Peng C T, Lin J C, Lin C T et al. Performance and package effect of a novel piezoresistive pressure sensor fabricated by front-side etching technology[J]. Sensors and Actuators A: Physical, 119, 28-37(2005).
[9] Wang J, Chen D J, Wei F et al. Research on frequency stabilization technology of transfer cavity based on all-fiber ring resonator[J]. Chinese Journal of Lasers, 47, 0906005(2020).
[10] Hu D, Zou C L, Ren H L et al. Multi-parameter sensing in a multimode self-interference micro-ring resonator by machine learning[J]. Sensors, 20, 709(2020).
[11] Cao Y, Dang Y C, Peng X F et al. Indoor visible light localization method using TOA/RSS hybrid information[J]. Chinese Journal of Lasers, 48, 0106005(2021).
[12] Luo L. Study on the pressure sensing properties of cantilever-type optical ring resonators[D](2016).
[13] Wu R B, Wang M, Xu J et al. Long low-loss-litium niobate on insulator waveguides with sub-nanometer surface roughness[J]. Nanomaterials, 8, E910(2018).
[14] Okamoto K[M]. Fundamentals of optical waveguides(2006).
[15] Vafaei R. Silicon on insulator ring resonators[R](2008).
[16] Chen Q, Wang D N, Gao F. Simultaneous refractive index and temperature sensing based on a fiber surface waveguide and fiber Bragg gratings[J]. Optics Letters, 46, 1209-1212(2021).
[17] Jiang Y[M]. Advanced Optical Fiber Sensing Technology(2009).
[18] Pattnaik P K, Vijayaaditya B, Srinivas T et al. Optical MEMS pressure sensor using ring resonator on a circular diaphragm[C], 277-280(2005).
[19] Pattnaik P K, Vijayaaditya B, Srinivas T et al. Optical MEMS pressure and vibration sensors using integrated optical ring resonators[C], 636-639(2005).
[20] Tang J J, Fan Q S[M]. Engineering mechanics(2017).
[21] Zhang H. Research and implementation of high-Q whispering gallery mode optical microcavities[D](2016).
[22] Su Y, Yan S B, Zhang Z D et al. Study on micropressure sensors of cantilever beam circular resonant cavity[J]. Instrument Technique and Sensor, 9-12, 16(2017).
[23] Zhang M, Wang C, Cheng R et al. Monolithic ultra-high-Q lithium niobate microring resonator[J]. Optica, 4, 1536-1537(2017).
[24] Zhang J H, Fang Z W, Lin J T et al. Fabrication of crystalline microresonators of high quality factors with a controllable wedge angle on lithium niobate on insulator[J]. Nanomaterials, 9, 1218(2019).