Xiaowei Ji, Jianmin Cui, Lihui Feng, Peng Guo, Ying Jiang, Wei Ji. Ring Resonator Pressure Sensor Based on LNOI[J]. Laser & Optoelectronics Progress, 2022, 59(3): 0323001
- Laser & Optoelectronics Progress
- Vol. 59, Issue 3, 0323001 (2022)
Fig. 1. Structure of LNOI
Fig. 2. Schematic diagram of ring resonator
Fig. 3. Output spectrum of ring resonator
Fig. 4. Structure of pressure sensor. (a) Without pressure; (b) under pressure
Fig. 5. Movement of the resonant peak. (a) Low Q factor; (b) high Q factor
Fig. 6. Schematic diagram of cantilever beam
Fig. 7. Cantilever beam under pressure
Fig. 8. Displacement of each section of cantilever beam
Fig. 9. Relationship between error and pressure
Fig. 10. Resonant peak line when critical coupling and non-critical coupling
Fig. 11. Resonant peak line with different losses
Fig. 12. Relationship between Q factor and loss
Fig. 13. Relationship between Q factor and the radius of ring waveguide
Fig. 14. Racetrack ring resonator
Fig. 15. Mode field distribution of TE mode in waveguide
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