• Laser & Optoelectronics Progress
  • Vol. 59, Issue 3, 0323001 (2022)
Xiaowei Ji1, Jianmin Cui1、*, Lihui Feng1, Peng Guo1, Ying Jiang1, and Wei Ji2
Author Affiliations
  • 1Key Laboratory of Information Photonics Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  • 2School of Information Science and Engineering, Shandong University, Ji'nan, Shandong 250100, China
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    DOI: 10.3788/LOP202259.0323001 Cite this Article Set citation alerts
    Xiaowei Ji, Jianmin Cui, Lihui Feng, Peng Guo, Ying Jiang, Wei Ji. Ring Resonator Pressure Sensor Based on LNOI[J]. Laser & Optoelectronics Progress, 2022, 59(3): 0323001 Copy Citation Text show less

    Abstract

    The ring resonator can be used for high precision and high sensitivity sensing. In this paper, the ring resonator is combined with cantilever pressure sensor. The expression of sensitivity of this pressure sensor is derived, the sensitivity will vary with the applied pressure. When the pressure is 1 kPa, the sensitivity is 71.73 pm/kPa. Lithium niobate on insulator (LNOI) which has low loss is used to design ring resonator to obtain a pressure sensor with high Q. It can improve the accuracy of pressure measurement. The effects of critical coupling and non critical coupling, waveguide loss and the perimeter of the ring waveguide on Q factor are discussed and analysed by Matlab. The results show that the most important factor is the waveguide loss. The increasing of the perimeter of the ring waveguide will not increase the Q factor directly, but will reduce the loss and increase the Q factor indirectly. The results show that when the radius of the ring waveguide is 80 μm and the waveguide loss is 0.6322 m-1, Q factor can reach 5.7×106.
    Xiaowei Ji, Jianmin Cui, Lihui Feng, Peng Guo, Ying Jiang, Wei Ji. Ring Resonator Pressure Sensor Based on LNOI[J]. Laser & Optoelectronics Progress, 2022, 59(3): 0323001
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