Jianyang Shi, Zengyi Xu, Wenqing Niu, Dong Li, Xiaoming Wu, Ziwei Li, Junwen Zhang, Chao Shen, Guangxu Wang, Xiaolan Wang, Jianli Zhang, Fengyi Jiang, Shaohua Yu, Nan Chi, "Si-substrate vertical-structure InGaN/GaN micro-LED-based photodetector for beyond 10 Gbps visible light communication," Photonics Res. 10, 2394 (2022)

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- Photonics Research
- Vol. 10, Issue 10, 2394 (2022)

Fig. 1. Benchmark of distance-rate product versus reverse bias voltage for micro-LED-based photodetectors.

Fig. 2. (a) Schematic of the vertical structure of Si-substrate micro-LED-based photodetector; SEM images of (b) 10 μm, (c) 50 μm, and (d) 100 μm chips.

Fig. 3. (a) Schematic of layout for 4 × 4 Si-substrate micro-LED array; optical microscope images of (b) 10 μm, (c) 50 μm, and (d) 100 μm micro-LED array.

Fig. 4. Responsivity spectra of (a) 10 μm, (b) 50 μm, and (c) 100 μm micro-LED-based photodetectors; electroluminescence spectra of (d) 10 μm, (e) 50 μm, and (f) 100 μm micro-LEDs.

Fig. 5. Current–voltage (I - V ) characteristics under the dark condition at (a) reverse bias and (b) forward bias; (c) photocurrent versus incident light power under the illumination of 450 nm light at − 20 V .

Fig. 6. Experimental setup of VLC system utilizing micro-LED-based photodetector.

Fig. 7. Measured forward transmission gains of (a) 10 μm, (b) 50 μm, and (c) 100 μm micro-LED-based photodetectors; (d) 10 and 20 dB bandwidths versus reverse bias.

Fig. 8. SNR versus reverse bias for (a) 10 μm, (b) 50 μm, and (c) 100 μm micro-LED-based photodetectors.

Fig. 9. Data rate versus bias current and signal Vpp for (a) 10 μm, (b) 50 μm, and (c) 100 μm micro-LED-based photodetectors.

Fig. 10. (a) Data rate versus reverse bias; (b) data rate versus incident light power for 10, 50, and 100 μm micro-LED-based photodetectors.

Fig. 11. Measured electrical spectra for (a) 10 μm, (b) 50 μm, and (c) 100 μm micro-LED-based photodetectors; maximum data rate and BER versus baudrate at 0.5 m for (d) 10 μm, (e) 50 μm, and (f) 100 μm micro-LED-based photodetectors.

Fig. 12. Data rate and BER versus transmission distance for 50 μm micro-LED-based photodetector.

Fig. 13. SNR and bit number versus frequency at 1.9 Gbaud for (a) 0.5 m and (b) 1 m transmission distance; power ratio versus frequency for (c) 0.5 m and (d) 1 m.
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Table 1. Capacitance versus Voltage of Micro-LED-Based Photodetectors
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Table 2. Recent Achievements of Micro-LED-Based Photodetectors

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