• Journal of Semiconductors
  • Vol. 41, Issue 10, 102802 (2020)
R. Singh1, T. R. Lenka1, R. T. Velpula2, B. Jain2..., H. Q. T. Bui2 and H. P. T. Nguyen2|Show fewer author(s)
Author Affiliations
  • 1Department of Electronics & Communication Engineering, National Institute of Technology Silchar, AS, 788010, India
  • 2Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, NJ, 07102, USA
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    DOI: 10.1088/1674-4926/41/10/102802 Cite this Article
    R. Singh, T. R. Lenka, R. T. Velpula, B. Jain, H. Q. T. Bui, H. P. T. Nguyen. Investigation of current collapse and recovery time due to deep level defect traps in β-Ga2O3 HEMT[J]. Journal of Semiconductors, 2020, 41(10): 102802 Copy Citation Text show less
    References

    [1] H Y He, R Orlando, M A Blanco et al. First-principles study of the structural, electronic, and optical properties of Ga2O3in its monoclinic and hexagonal phases. Phys Rev B, 74, 195123(2006).

    [2] M Higashiwaki, K Sasaki, A Kuramata et al. Gallium oxide (Ga2O3) metal–semiconductor field-effect transistors on single-crystal β-Ga2O3 (010) substrates. Appl Phys Lett, 100, 013504(2012).

    [3] K Ghosh, U Singisetti. Ab initio velocity-field curves in monoclinic β-Ga2O3. J Appl Phys, 122, 035702(2017).

    [4] J B Varley, J R Weber, A Janotti et al. Oxygen vacancies and donor impurities in β-Ga2O3. Appl Phys Lett, 97, 142106(2010).

    [5] E Chikoidze, A Fellous, A Perez-Tomas et al. P-type β-gallium oxide: A new perspective for power and optoelectronic devices. Mater Today Phys, 3, 118(2017).

    [6] A Kyrtsos, M Matsubara, E Bellotti. On the feasibility of p-type Ga2O3. Appl Phys Lett, 112, 032108(2018).

    [7] Y Tomm, P Reiche, D Klimm et al. Czochralski grown Ga2O3 crystals. J Cryst Growth, 220, 510(2000).

    [8] H Aida, K Nishiguchi, H Takeda et al. Growth of β-Ga2O3 single crystals by the edge-defined, film fed growth method. Jpn J Appl Phys, 47, 8506(2008).

    [9] E Farzana, E Ahmadi, J S Speck et al. Deep level defects in Ge-doped (010) β-Ga2O3 layers grown by plasma-assisted molecular beam epitaxy. J Appl Phys, 123, 161410(2018).

    [10] Z Zhang, E Farzana, A R Arehart et al. Erratum: “Deep level defects throughout the bandgap of (010) β-Ga2O3 detected by optically and thermally stimulated defect spectroscopy” [Appl. Phys. Lett. 108, 052105 (2016)]. Appl Phys Lett, 108, 079901(2016).

    [11] K Irmscher, Z Galazka, M Pietsch et al. Electrical properties of β-Ga2O3 single crystals grown by the Czochralski method. J Appl Phys, 110, 063720(2011).

    [12] M E Ingebrigtsen, J B Varley, A Y Kuznetsov et al. Iron and intrinsic deep level states in Ga2O3. Appl Phys Lett, 112, 042104(2018).

    [13] K Sasaki, M Higashiwaki, A Kuramata et al. Ga2O3 Schottky barrier diodes fabricated by using single-crystal β-Ga2O3 (010) substrates. IEEE Electron Device Lett, 34, 493(2013).

    [14] S Krishnamoorthy, Z B Xia, S Bajaj et al. Delta-doped β-gallium oxide field-effect transistor. Appl Phys Express, 10, 051102(2017).

    [15] H Zhou, K Maize, G Qiu et al. β-Ga2O3 on insulator field-effect transistors with drain currents exceeding 1.5 A/mm and their self-heating effect. Appl Phys Lett, 111, 092102(2017).

    [16] T Oshima, Y Kato, N Kawano et al. Carrier confinement observed at modulation-doped β-(AlxGa1–x)2O3/Ga2O3 heterojunction interface. Appl Phys Express, 10, 035701(2017).

    [17] Y W Zhang, A Neal, Z B Xia et al. Demonstration of high mobility and quantum transport in modulation-doped β-(AlxGa1 –x)2O3/Ga2O3 heterostructures. Appl Phys Lett, 112, 173502(2018).

    [18] J F McGlone, Z B Xia, Y W Zhang et al. Trapping effects in Si δ-doped β-Ga2O3 MESFETs on an Fe-doped β-Ga2O3 substrate. IEEE Electron Device Lett, 39, 1042(2018).

    [19] A Y Polyakov, N B Smirnov, I V Shchemerov et al. Defect states determining dynamic trapping-detrapping in β-Ga2O3 field-effect transistors. ECS J Solid State Sci Technol, 8, Q3013(2019).

    [20] H D Sun, C G Torres Castanedo, K K Liu et al. Valence and conduction band offsets of β-Ga2O3/AlN heterojunction. Appl Phys Lett, 111, 162105(2017).

    [21] A Mock, R Korlacki, C Briley et al. Band-to-band transitions, selection rules, effective mass, and excitonic contributions in monoclinic β-Ga2O3. Phys Rev B, 96, 245205(2017).

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    [23]

    [24]

    R. Singh, T. R. Lenka, R. T. Velpula, B. Jain, H. Q. T. Bui, H. P. T. Nguyen. Investigation of current collapse and recovery time due to deep level defect traps in β-Ga2O3 HEMT[J]. Journal of Semiconductors, 2020, 41(10): 102802
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