Chao Yang, Xianchang Zhu, Chuan Jin, Song Hu. Design of X-Y Flexible Adjustment Mechanism for Moving Mirror in Lithographic Projection Objective[J]. Laser & Optoelectronics Progress, 2022, 59(4): 0411002
- Laser & Optoelectronics Progress
- Vol. 59, Issue 4, 0411002 (2022)
Fig. 1. Equivalent diagram of X-Y direction flexible adjustment mechanism
Fig. 2. Round notch flexible hinge
Fig. 3. Schematic diagram of micro-movement mechanism in X-Y direction
Fig. 4. Three-dimensional model of X-Y direction flexible adjustment mechanism
Fig. 5. Finite element calculation model
Fig. 6. Relationship between FX and displacement
Fig. 7. Relationship between FY and displacement
Fig. 8. Natural vibration modes of X-Y flexible micro adjustment mechanism. (a) First mode; (b) second mode; (c) third mode; (d) fourth mode; (e) fifth mode; (f) sixth mode
Fig. 9. Experimental device diagram of X-Y direction adjusting mechanism performance test
Fig. 10. Schematic diagram of X/Y reciprocating motion process
Fig. 11. Test results of repeated positioning accuracy of X-direction drive. (a) P1 point; (b) P2 point; (c) P3 point; (d) P4 point; (e) P5 point; (f) P6 point
Fig. 12. Test results of repeated positioning accuracy of Y-direction drive. (a) P1 point; (b) P2 point; (c) P3 point; (d) P4 point; (e) P5 point; (f) P6 point
Fig. 13. Test results
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Table 1. Material properties
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Table 2. First 6 natural frequencies of mechanism
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