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    Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 4 >Page 0411002 > Article
    • Laser & Optoelectronics Progress
    • Vol. 59, Issue 4, 0411002 (2022)
    Design of X-Y Flexible Adjustment Mechanism for Moving Mirror in Lithographic Projection Objective
    Chao Yang1、2, Xianchang Zhu1, Chuan Jin1、2, and Song Hu1、*
    Author Affiliations
  • 1State Key Laboratory of Optical Technologies for Micro-Fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu , Sichuan 610209, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/LOP202259.0411002 Cite this Article Set citation alerts
    Chao Yang, Xianchang Zhu, Chuan Jin, Song Hu. Design of X-Y Flexible Adjustment Mechanism for Moving Mirror in Lithographic Projection Objective[J]. Laser & Optoelectronics Progress, 2022, 59(4): 0411002 Copy Citation Text show less
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    Article index updated: May. 19, 2024
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    The article is cited by 2 article(s) from Researching.
    Abstract
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    Chao Yang, Xianchang Zhu, Chuan Jin, Song Hu. Design of X-Y Flexible Adjustment Mechanism for Moving Mirror in Lithographic Projection Objective[J]. Laser & Optoelectronics Progress, 2022, 59(4): 0411002
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    Paper Information
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