Aiming at the requirements of high precision, small stroke, and compact structure of X-Y direction adjustment mechanism of moving mirror in lithography projection objective, an X-Y direction integrated adjustment mechanism is proposed. Based on the four-bar adjustment principle, the proposed mechanism uses X-Y flexure hinges with independent inner and outer rings to realize high-precision adjustment in X/Y direction without decoupling. First, the structure design of the proposed mechanism is completed according to the adjustment accuracy and stroke of the moving mirror in the projection objective; then, the performance of the proposed X-Y flexible adjusting mechanism is simulated and analyzed by using the finite element analysis method. The analysis results show that the adjustment stroke of the mechanism is greater than ±20 μm. The stiffness values in X direction and Y direction are 0.542 μm/N, 0.671 μm/N, respectively; the ratio of the vertical coupling error to the displacement in the main direction is 6.86% and 4%, respectively; the mode is greater than 100 Hz. Finally, the performance test of the proposed adjustment mechanism is carried out, the repeated positioning accuracy in X direction and Y direction is 36.3 nm and 41.7 nm,respectively. During the adjustment process, the angle offset is less than 0.5". The experimental results show that the proposed flexible adjustment mechanism can meet the high-precision adjustment requirements of X-Y direction for image quality compensation of lithographic projection objective.