Silicon substrate-integrated hollow waveguide for miniaturized optical gas sensing

Shaonan Zheng; Hong Cai; Linfang Xu; Nanxi Li; Zhonghua Gu; Yao Zhang; Weiguo Chen; Yanyan Zhou; Qingxin Zhang; Lennon Yao Ting Lee

doi:10.1364/PRJ.439434

Journals >Photonics Research >Volume 10 >Issue 1 >Page 261 > Article

Photonics Research
Vol. 10, Issue 1, 261 (2022)

Silicon substrate-integrated hollow waveguide for miniaturized optical gas sensing

Shaonan Zheng, Hong Cai, Linfang Xu, Nanxi Li^*, Zhonghua Gu, Yao Zhang, Weiguo Chen, Yanyan Zhou, Qingxin Zhang, and Lennon Yao Ting Lee

Author Affiliations

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore

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DOI: 10.1364/PRJ.439434 Cite this Article Set citation alerts

Shaonan Zheng, Hong Cai, Linfang Xu, Nanxi Li, Zhonghua Gu, Yao Zhang, Weiguo Chen, Yanyan Zhou, Qingxin Zhang, Lennon Yao Ting Lee. Silicon substrate-integrated hollow waveguide for miniaturized optical gas sensing[J]. Photonics Research, 2022, 10(1): 261 Copy Citation Text

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