Inline Optical Measurement and Inspection for IC Manufacturing: State-of-the-Art, Challenges, and Perspectives

Xiuguo Chen; Cai Wang; Tianjuan Yang; Jiamin Liu; Chengfeng Luo; Shiyuan Liu

doi:10.3788/LOP202259.0922025

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 9 >Page 0922025 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 9, 0922025 (2022)

Inline Optical Measurement and Inspection for IC Manufacturing: State-of-the-Art, Challenges, and Perspectives

Xiuguo Chen^*, Cai Wang, Tianjuan Yang, Jiamin Liu, Chengfeng Luo, and Shiyuan Liu^**

Author Affiliations

State Key Laboratory of Digital Manufacturing and Equipment, Huazhong University of Science and Technology, Wuhan 430074, Hubei , China

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DOI: 10.3788/LOP202259.0922025 Cite this Article Set citation alerts

Xiuguo Chen, Cai Wang, Tianjuan Yang, Jiamin Liu, Chengfeng Luo, Shiyuan Liu. Inline Optical Measurement and Inspection for IC Manufacturing: State-of-the-Art, Challenges, and Perspectives[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922025 Copy Citation Text

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