InGaAs Surface Cleaning Based on Scanning Focused XPS Technique

Minmin Rong; Yijun Zhang; Shiman Li; Gangcheng Jiao; Weixin Liu; Ziheng Wang; Zhaoxin Shu; Yunsheng Qian

doi:10.3788/AOS202141.0516004

Journals >Acta Optica Sinica >Volume 41 >Issue 5 >Page 0516004 > Article

Acta Optica Sinica
Vol. 41, Issue 5, 0516004 (2021)

InGaAs Surface Cleaning Based on Scanning Focused XPS Technique

Minmin Rong¹, Yijun Zhang^1、*, Shiman Li¹, Gangcheng Jiao², Weixin Liu³, Ziheng Wang¹, Zhaoxin Shu¹, and Yunsheng Qian¹

Author Affiliations

¹School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China

²Science and Technology on Low-Light-Level Night Vision Laboratory, Xi′an, Shaanxi 710065, China

³No. 808 Institute, Shanghai Academy of Spacecraft Technology, Shanghai 201109, China

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DOI: 10.3788/AOS202141.0516004 Cite this Article Set citation alerts

Minmin Rong, Yijun Zhang, Shiman Li, Gangcheng Jiao, Weixin Liu, Ziheng Wang, Zhaoxin Shu, Yunsheng Qian. InGaAs Surface Cleaning Based on Scanning Focused XPS Technique[J]. Acta Optica Sinica, 2021, 41(5): 0516004 Copy Citation Text

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