• Photonics Research
  • Vol. 6, Issue 2, 109 (2018)
Miaofeng Li1、2、3, Lei Wang2、3, Xiang Li2、3, Xi Xiao2、3、*, and Shaohua Yu1、2、3
Author Affiliations
  • 1Wuhan National Laboratory for Optoelectronics, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China
  • 2State Key Laboratory of Optical Communication Technologies and Networks, Wuhan Research Institute of Posts & Telecommunications, Wuhan 430074, Hubei, China
  • 3National Information Optoelectronics Innovation Center, Wuhan 430074, Hubei, China
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    DOI: 10.1364/PRJ.6.000109 Cite this Article Set citation alerts
    Miaofeng Li, Lei Wang, Xiang Li, Xi Xiao, Shaohua Yu. Silicon intensity Mach–Zehnder modulator for single lane 100  Gb/s applications[J]. Photonics Research, 2018, 6(2): 109 Copy Citation Text show less

    Abstract

    In this paper, a substrate removing technique in a silicon Mach–Zehnder modulator (MZM) is proposed and demonstrated to improve modulation bandwidth. Based on the novel and optimized traveling wave electrodes, the electrode transmission loss is reduced, and the electro-optical group index and 50 Ω impedance matching are improved, simultaneously. A 2 mm long substrate removed silicon MZM with the measured and extrapolated 3 dB electro-optical bandwidth of >50 GHz and 60 GHz at the 8 V bias voltage is designed and fabricated. Open optical eye diagrams of up to 90 GBaud/s NRZ and 56 GBaud/s four-level pulse amplitude modulation (PAM-4) are experimentally obtained without additional optical or digital compensations. Based on this silicon MZM, the performance in a short-reach transmission system is further investigated. Single-lane 112 Gb/s and 128 Gb/s transmissions over different distances of 1 km, 2 km, and 10 km are experimentally achieved based on this high-speed silicon MZM.
    EOS21=10log|S21|22·|S21|·cos(βoptμ·l)+1(ln|S21|)2+(βoptμ·l)2,(1)

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    βoptμ=ωmc(nμnopt),(2)

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    Miaofeng Li, Lei Wang, Xiang Li, Xi Xiao, Shaohua Yu. Silicon intensity Mach–Zehnder modulator for single lane 100  Gb/s applications[J]. Photonics Research, 2018, 6(2): 109
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