• Chinese Optics Letters
  • Vol. 19, Issue 7, 071301 (2021)
Hui Ma1, Haotian Yang1, Bo Tang2, Maoliang Wei1, Junying Li1, Jianghong Wu3、4, Peng Zhang2, Chunlei Sun3、4, Lan Li3、4, and Hongtao Lin1、*
Author Affiliations
  • 1State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310007, China
  • 2Institute of Microelectronics, Chinese Academic Society, Beijing 100029, China
  • 3Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310007, China
  • 4Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310023, China
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    DOI: 10.3788/COL202119.071301 Cite this Article Set citation alerts
    Hui Ma, Haotian Yang, Bo Tang, Maoliang Wei, Junying Li, Jianghong Wu, Peng Zhang, Chunlei Sun, Lan Li, Hongtao Lin. Passive devices at 2 µm wavelength on 200 mm CMOS-compatible silicon photonics platform [Invited][J]. Chinese Optics Letters, 2021, 19(7): 071301 Copy Citation Text show less

    Abstract

    As a promising spectral window for optical communication and sensing, it is of great significance to realize on-chip devices at the 2 µm waveband. The development of the 2 µm silicon photonic platform mainly depends on the performance of passive devices. In this work, the passive devices were fabricated in the silicon photonic multi-project wafer process. The designed micro-ring resonator with a 0.6 µm wide silicon ridge waveguide based on a 220 nm silicon-on-insulator platform achieves a high intrinsic quality factor of 3.0×105. The propagation loss is calculated as 1.62 dB/cm. In addition, the waveguide crossing, multimode interferometer, and Mach–Zehnder interferometer were demonstrated at 2 µm with good performances.
    Λ=λneffn1sinθ,

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    Hui Ma, Haotian Yang, Bo Tang, Maoliang Wei, Junying Li, Jianghong Wu, Peng Zhang, Chunlei Sun, Lan Li, Hongtao Lin. Passive devices at 2 µm wavelength on 200 mm CMOS-compatible silicon photonics platform [Invited][J]. Chinese Optics Letters, 2021, 19(7): 071301
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