Passive devices at 2 &#181;m wavelength on 200 mm CMOS-compatible silicon photonics platform [Invited]

Hui Ma; Haotian Yang; Bo Tang; Maoliang Wei; Junying Li; Jianghong Wu; Peng Zhang; Chunlei Sun; Lan Li; Hongtao Lin

doi:10.3788/COL202119.071301

Journals >Chinese Optics Letters >Volume 19 >Issue 7 >Page 071301 > Article

Chinese Optics Letters
Vol. 19, Issue 7, 071301 (2021)

Passive devices at 2 µm wavelength on 200 mm CMOS-compatible silicon photonics platform [Invited]

Hui Ma¹, Haotian Yang¹, Bo Tang², Maoliang Wei¹, Junying Li¹, Jianghong Wu^3、4, Peng Zhang², Chunlei Sun^3、4, Lan Li^3、4, and Hongtao Lin^1、*

Author Affiliations

¹State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310007, China

²Institute of Microelectronics, Chinese Academic Society, Beijing 100029, China

³Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310007, China

⁴Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310023, China

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DOI: 10.3788/COL202119.071301 Cite this Article Set citation alerts

Hui Ma, Haotian Yang, Bo Tang, Maoliang Wei, Junying Li, Jianghong Wu, Peng Zhang, Chunlei Sun, Lan Li, Hongtao Lin. Passive devices at 2 µm wavelength on 200 mm CMOS-compatible silicon photonics platform [Invited][J]. Chinese Optics Letters, 2021, 19(7): 071301 Copy Citation Text

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