• Journal of Semiconductors
  • Vol. 40, Issue 1, 012805 (2019)
Jianjun Shi, Xiaochuan Xia, Qasim Abbas, Jun Liu, Heqiu Zhang, Yang Liu, and Hongwei Liang
Author Affiliations
  • School of Microelectronics, Dalian University of Technology, Dalian 116024, China
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    DOI: 10.1088/1674-4926/40/1/012805 Cite this Article
    Jianjun Shi, Xiaochuan Xia, Qasim Abbas, Jun Liu, Heqiu Zhang, Yang Liu, Hongwei Liang. Current transport mechanism of Mg/Au ohmic contacts to lightly doped n-type β-Ga2O3[J]. Journal of Semiconductors, 2019, 40(1): 012805 Copy Citation Text show less
    (Color online) I–V curves for as-prepared and 400 °C annealed samples. The insert is the schematic structure of the Mg/Au/β-Ga2O3 contact.
    Fig. 1. (Color online) I–V curves for as-prepared and 400 °C annealed samples. The insert is the schematic structure of the Mg/Au/β-Ga2O3 contact.
    (Color online) (a) Resistance of Mg/Au-β-Ga2O3 structure with two adjacent ohmic contacts versus the distance at different temperatures. (b) Contact resistance and sheet resistance of the ohmic contact Mg/Au-β-Ga2O3 versus measuring temperatures.
    Fig. 2. (Color online) (a) Resistance of Mg/Au-β-Ga2O3 structure with two adjacent ohmic contacts versus the distance at different temperatures. (b) Contact resistance and sheet resistance of the ohmic contact Mg/Au-β-Ga2O3 versus measuring temperatures.
    (Color online) Specific contact resistance of the ohmic contact Mg/Au-β-Ga2O3 versus measuring temperatures.
    Fig. 3. (Color online) Specific contact resistance of the ohmic contact Mg/Au-β-Ga2O3 versus measuring temperatures.
    (Color online) The dependence of ln (ρcT) on 1/T graph about Mg/Au-β-Ga2O3 ohmic contact for the annealed sample, experimental data (point) and TE model fitting (line).
    Fig. 4. (Color online) The dependence of ln (ρcT) on 1/T graph about Mg/Au-β-Ga2O3 ohmic contact for the annealed sample, experimental data (point) and TE model fitting (line).
    Jianjun Shi, Xiaochuan Xia, Qasim Abbas, Jun Liu, Heqiu Zhang, Yang Liu, Hongwei Liang. Current transport mechanism of Mg/Au ohmic contacts to lightly doped n-type β-Ga2O3[J]. Journal of Semiconductors, 2019, 40(1): 012805
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