• Journal of Semiconductors
  • Vol. 42, Issue 11, 114101 (2021)
Yuwei Cai1、2, Zhaohao Zhang1, Qingzhu Zhang1, Jinjuan Xiang1, Gaobo Xu1, Zhenhua Wu1, Jie Gu1、2, and Huaxiang Yin1
Author Affiliations
  • 1Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.1088/1674-4926/42/11/114101 Cite this Article
    Yuwei Cai, Zhaohao Zhang, Qingzhu Zhang, Jinjuan Xiang, Gaobo Xu, Zhenhua Wu, Jie Gu, Huaxiang Yin. Investigation of time domain characteristics of negative capacitance FinFET by pulse-train approaches[J]. Journal of Semiconductors, 2021, 42(11): 114101 Copy Citation Text show less
    (Color online) (a) The fabrication flow of the fabrication of NC FinFET. (b) Cross-sectional TEM image of the NC FinFET device. (c) Schematic diagram of the resistive load inverter characterization single-transistor frequency characteristics test circuit. (d) Schematic diagram of the optimization measurement scheme.
    Fig. 1. (Color online) (a) The fabrication flow of the fabrication of NC FinFET. (b) Cross-sectional TEM image of the NC FinFET device. (c) Schematic diagram of the resistive load inverter characterization single-transistor frequency characteristics test circuit. (d) Schematic diagram of the optimization measurement scheme.
    (Color online) Real-time output data of the load-resistance based inverter measurement, with the gate pulse width (a) 1 ms, and (b) 10 μs, respectively.
    Fig. 2. (Color online) Real-time output data of the load-resistance based inverter measurement, with the gate pulse width (a) 1 ms, and (b) 10 μs, respectively.
    (Color online) Experimentally measured output voltage as a function of the applied gate signal frequencies.
    Fig. 3. (Color online) Experimentally measured output voltage as a function of the applied gate signal frequencies.
    Waveforms of different frequencies displayed directly on the oscilloscope after resistive loading, (a)10 kHz and (b) 100 kHz.
    Fig. 4. Waveforms of different frequencies displayed directly on the oscilloscope after resistive loading, (a)10 kHz and (b) 100 kHz.
    (Color online) The measured real-time pulse train on-current of single-transistor.
    Fig. 5. (Color online) The measured real-time pulse train on-current of single-transistor.
    (Color online) Measured transient currents of the single transistor, (a) with 10 ms pulse width, (b) with 1 μs pulse width, (c) variation of the extracted on-state currents of the single-transistor with frequency at different gate voltages.
    Fig. 6. (Color online) Measured transient currents of the single transistor, (a) with 10 ms pulse width, (b) with 1 μs pulse width, (c) variation of the extracted on-state currents of the single-transistor with frequency at different gate voltages.
    (Color online) Real-time test results of on-state IDS of the NC FinFET.
    Fig. 7. (Color online) Real-time test results of on-state IDS of the NC FinFET.
    (Color online) Experimentally measured variation of the on-state current with pulse width for NC FinFET and conventional FinFET. (a) NMOS. (b) PMOS.
    Fig. 8. (Color online) Experimentally measured variation of the on-state current with pulse width for NC FinFET and conventional FinFET. (a) NMOS. (b) PMOS.
    Yuwei Cai, Zhaohao Zhang, Qingzhu Zhang, Jinjuan Xiang, Gaobo Xu, Zhenhua Wu, Jie Gu, Huaxiang Yin. Investigation of time domain characteristics of negative capacitance FinFET by pulse-train approaches[J]. Journal of Semiconductors, 2021, 42(11): 114101
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