Zehong Wan, Enkang Cui, Shengtao Yu, Yu Lei, Chengqun Gui, Shengjun Zhou. Effects of Reactive Ion Etching Parameters on Etching Rate and Surface Roughness of 4H-SiC[J]. Laser & Optoelectronics Progress, 2021, 58(19): 1922002

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- Laser & Optoelectronics Progress
- Vol. 58, Issue 19, 1922002 (2021)
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