Yongkang Xu, Sannian Song, Wencheng Fang, Chengxing Li, Zhitang Song. The etching process and mechanism analysis of Ta-Sb2Te3 film based on inductively coupled plasma[J]. Journal of Semiconductors, 2020, 41(12): 122103

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- Journal of Semiconductors
- Vol. 41, Issue 12, 122103 (2020)
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