• Chinese Optics Letters
  • Vol. 13, Issue 8, 082201 (2015)
Jun Cheng* and Nan Yan
Author Affiliations
  • School of Electromechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
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    DOI: 10.3788/COL201513.082201 Cite this Article Set citation alerts
    Jun Cheng, Nan Yan. Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator[J]. Chinese Optics Letters, 2015, 13(8): 082201 Copy Citation Text show less
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    Jun Cheng, Nan Yan. Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator[J]. Chinese Optics Letters, 2015, 13(8): 082201
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