Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator

Jun Cheng; Nan Yan

doi:10.3788/COL201513.082201

Journals >Chinese Optics Letters >Volume 13 >Issue 8 >Page 082201 > Article

Chinese Optics Letters
Vol. 13, Issue 8, 082201 (2015)

Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator

Jun Cheng^* and Nan Yan

Author Affiliations

School of Electromechanical Engineering, Beijing Institute of Technology, Beijing 100081, China

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DOI: 10.3788/COL201513.082201 Cite this Article Set citation alerts

Jun Cheng, Nan Yan. Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator[J]. Chinese Optics Letters, 2015, 13(8): 082201 Copy Citation Text

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Jun Cheng, Nan Yan. Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator[J]. Chinese Optics Letters, 2015, 13(8): 082201

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